JPS6416638U - - Google Patents
Info
- Publication number
- JPS6416638U JPS6416638U JP11176087U JP11176087U JPS6416638U JP S6416638 U JPS6416638 U JP S6416638U JP 11176087 U JP11176087 U JP 11176087U JP 11176087 U JP11176087 U JP 11176087U JP S6416638 U JPS6416638 U JP S6416638U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- flat
- probe
- location
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
第1図は本考案装置の一実施例を説明するため
のプローブ装置の構成図、第2図、第3図は第1
図のプローブカード及び保持具の一実施例説明図
、第4図はアダプターの断面図、第5図、第6図
はプローブカード自動交換説明図である。
9a,9b……保持具、11……プローブカー
ド、12a,12b,13,15……オリエンテ
ーシヨン・フラツト、14……アダプター。
FIG. 1 is a configuration diagram of a probe device for explaining one embodiment of the device of the present invention, and FIGS.
FIG. 4 is a cross-sectional view of the adapter, and FIGS. 5 and 6 are explanatory views of the probe card and the holder according to an embodiment of the present invention. 9a, 9b...Holder, 11...Probe card, 12a, 12b, 13, 15...Orientation flat, 14...Adapter.
Claims (1)
なくとも1箇所設けられたオリエンテーシヨン・
フラツトを具備してなることを特徴とするプロー
ブ装置。 An orientation point provided at least at one location on a probe card or holder having a circular outer shape.
A probe device characterized by comprising a flat.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987111760U JPH0528767Y2 (en) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987111760U JPH0528767Y2 (en) | 1987-07-20 | 1987-07-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6416638U true JPS6416638U (en) | 1989-01-27 |
JPH0528767Y2 JPH0528767Y2 (en) | 1993-07-23 |
Family
ID=31350094
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987111760U Expired - Lifetime JPH0528767Y2 (en) | 1987-07-20 | 1987-07-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0528767Y2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5721831A (en) * | 1980-07-14 | 1982-02-04 | Nec Kyushu Ltd | Inspecting device for semiconductor wafer |
-
1987
- 1987-07-20 JP JP1987111760U patent/JPH0528767Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5721831A (en) * | 1980-07-14 | 1982-02-04 | Nec Kyushu Ltd | Inspecting device for semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
JPH0528767Y2 (en) | 1993-07-23 |