JPS6416638U - - Google Patents

Info

Publication number
JPS6416638U
JPS6416638U JP11176087U JP11176087U JPS6416638U JP S6416638 U JPS6416638 U JP S6416638U JP 11176087 U JP11176087 U JP 11176087U JP 11176087 U JP11176087 U JP 11176087U JP S6416638 U JPS6416638 U JP S6416638U
Authority
JP
Japan
Prior art keywords
holder
flat
probe
location
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11176087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528767Y2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987111760U priority Critical patent/JPH0528767Y2/ja
Publication of JPS6416638U publication Critical patent/JPS6416638U/ja
Application granted granted Critical
Publication of JPH0528767Y2 publication Critical patent/JPH0528767Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP1987111760U 1987-07-20 1987-07-20 Expired - Lifetime JPH0528767Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987111760U JPH0528767Y2 ( ) 1987-07-20 1987-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987111760U JPH0528767Y2 ( ) 1987-07-20 1987-07-20

Publications (2)

Publication Number Publication Date
JPS6416638U true JPS6416638U ( ) 1989-01-27
JPH0528767Y2 JPH0528767Y2 ( ) 1993-07-23

Family

ID=31350094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987111760U Expired - Lifetime JPH0528767Y2 ( ) 1987-07-20 1987-07-20

Country Status (1)

Country Link
JP (1) JPH0528767Y2 ( )

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5721831A (en) * 1980-07-14 1982-02-04 Nec Kyushu Ltd Inspecting device for semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5721831A (en) * 1980-07-14 1982-02-04 Nec Kyushu Ltd Inspecting device for semiconductor wafer

Also Published As

Publication number Publication date
JPH0528767Y2 ( ) 1993-07-23

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