JPS6416362A - Groove machining method for collection mirror - Google Patents

Groove machining method for collection mirror

Info

Publication number
JPS6416362A
JPS6416362A JP62170173A JP17017387A JPS6416362A JP S6416362 A JPS6416362 A JP S6416362A JP 62170173 A JP62170173 A JP 62170173A JP 17017387 A JP17017387 A JP 17017387A JP S6416362 A JPS6416362 A JP S6416362A
Authority
JP
Japan
Prior art keywords
groove
stage
depth
machining
distortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62170173A
Other languages
Japanese (ja)
Inventor
Michio Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62170173A priority Critical patent/JPS6416362A/en
Publication of JPS6416362A publication Critical patent/JPS6416362A/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PURPOSE:To prevent the occurrence of tipping, residual processing distortion, and unevenness in the depth of a groove and to form the high-precise shape of a groove, by a method wherein, by using a single or a combination grinding stone, a cutting amount of a grinding stone is provided in a manner to be divided in many stages based on the given depth of a groove. CONSTITUTION:When groove machining is applied on a collecting mirror 1 made of an Si crystal by 2-stage cutting through the use of, for example, a single grinding stone 4, the depth of a first stage groove 2 is set to d1=6.5 mm and the depth of a second-stage groove 3 to d2=0.2 mm, and a feed speed is set to a value being approximate two times as high as that of a conventional first stage machining. In which case, machining distortion of a groove bottom part, occurring at a first stage machining time, is higher than that of a conventional method, but since the distortion is removed at a second stage machining time, it is enoughly decreased. Further, since a final cutting amount is low, coarseness of a machined surface and wear of a grinding stone are low, and groove precision is improved. This method prevents the occurrence of a trouble, e.g. tipping, residual machining distortion, unevenness in the depth of a groove, which heretofore occurs, and enables provision of the high-precise shape of a groove.
JP62170173A 1987-07-07 1987-07-07 Groove machining method for collection mirror Pending JPS6416362A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62170173A JPS6416362A (en) 1987-07-07 1987-07-07 Groove machining method for collection mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62170173A JPS6416362A (en) 1987-07-07 1987-07-07 Groove machining method for collection mirror

Publications (1)

Publication Number Publication Date
JPS6416362A true JPS6416362A (en) 1989-01-19

Family

ID=15900044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62170173A Pending JPS6416362A (en) 1987-07-07 1987-07-07 Groove machining method for collection mirror

Country Status (1)

Country Link
JP (1) JPS6416362A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018039085A (en) * 2016-09-08 2018-03-15 株式会社ディスコ Cutting method
JP2020093307A (en) * 2018-12-10 2020-06-18 株式会社ディスコ Fine frog manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018039085A (en) * 2016-09-08 2018-03-15 株式会社ディスコ Cutting method
JP2020093307A (en) * 2018-12-10 2020-06-18 株式会社ディスコ Fine frog manufacturing method

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