JPS6416362A - Groove machining method for collection mirror - Google Patents
Groove machining method for collection mirrorInfo
- Publication number
- JPS6416362A JPS6416362A JP62170173A JP17017387A JPS6416362A JP S6416362 A JPS6416362 A JP S6416362A JP 62170173 A JP62170173 A JP 62170173A JP 17017387 A JP17017387 A JP 17017387A JP S6416362 A JPS6416362 A JP S6416362A
- Authority
- JP
- Japan
- Prior art keywords
- groove
- stage
- depth
- machining
- distortion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
PURPOSE:To prevent the occurrence of tipping, residual processing distortion, and unevenness in the depth of a groove and to form the high-precise shape of a groove, by a method wherein, by using a single or a combination grinding stone, a cutting amount of a grinding stone is provided in a manner to be divided in many stages based on the given depth of a groove. CONSTITUTION:When groove machining is applied on a collecting mirror 1 made of an Si crystal by 2-stage cutting through the use of, for example, a single grinding stone 4, the depth of a first stage groove 2 is set to d1=6.5 mm and the depth of a second-stage groove 3 to d2=0.2 mm, and a feed speed is set to a value being approximate two times as high as that of a conventional first stage machining. In which case, machining distortion of a groove bottom part, occurring at a first stage machining time, is higher than that of a conventional method, but since the distortion is removed at a second stage machining time, it is enoughly decreased. Further, since a final cutting amount is low, coarseness of a machined surface and wear of a grinding stone are low, and groove precision is improved. This method prevents the occurrence of a trouble, e.g. tipping, residual machining distortion, unevenness in the depth of a groove, which heretofore occurs, and enables provision of the high-precise shape of a groove.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170173A JPS6416362A (en) | 1987-07-07 | 1987-07-07 | Groove machining method for collection mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170173A JPS6416362A (en) | 1987-07-07 | 1987-07-07 | Groove machining method for collection mirror |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6416362A true JPS6416362A (en) | 1989-01-19 |
Family
ID=15900044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62170173A Pending JPS6416362A (en) | 1987-07-07 | 1987-07-07 | Groove machining method for collection mirror |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6416362A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018039085A (en) * | 2016-09-08 | 2018-03-15 | 株式会社ディスコ | Cutting method |
JP2020093307A (en) * | 2018-12-10 | 2020-06-18 | 株式会社ディスコ | Fine frog manufacturing method |
-
1987
- 1987-07-07 JP JP62170173A patent/JPS6416362A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018039085A (en) * | 2016-09-08 | 2018-03-15 | 株式会社ディスコ | Cutting method |
JP2020093307A (en) * | 2018-12-10 | 2020-06-18 | 株式会社ディスコ | Fine frog manufacturing method |
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