JPS6416051U - - Google Patents
Info
- Publication number
- JPS6416051U JPS6416051U JP11018887U JP11018887U JPS6416051U JP S6416051 U JPS6416051 U JP S6416051U JP 11018887 U JP11018887 U JP 11018887U JP 11018887 U JP11018887 U JP 11018887U JP S6416051 U JPS6416051 U JP S6416051U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- chamber
- oven
- container
- source chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11018887U JPS6416051U (enExample) | 1987-07-17 | 1987-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11018887U JPS6416051U (enExample) | 1987-07-17 | 1987-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416051U true JPS6416051U (enExample) | 1989-01-26 |
Family
ID=31347117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11018887U Pending JPS6416051U (enExample) | 1987-07-17 | 1987-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416051U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60235346A (ja) * | 1984-05-08 | 1985-11-22 | Mitsubishi Electric Corp | イオンビ−ム発生装置 |
-
1987
- 1987-07-17 JP JP11018887U patent/JPS6416051U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60235346A (ja) * | 1984-05-08 | 1985-11-22 | Mitsubishi Electric Corp | イオンビ−ム発生装置 |