JPS6415959A - Positioning device of semiconductor element - Google Patents

Positioning device of semiconductor element

Info

Publication number
JPS6415959A
JPS6415959A JP62171190A JP17119087A JPS6415959A JP S6415959 A JPS6415959 A JP S6415959A JP 62171190 A JP62171190 A JP 62171190A JP 17119087 A JP17119087 A JP 17119087A JP S6415959 A JPS6415959 A JP S6415959A
Authority
JP
Japan
Prior art keywords
guide hole
flat type
vacuum pad
semiconductor element
size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62171190A
Other languages
English (en)
Inventor
Hidehiko Tomota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP62171190A priority Critical patent/JPS6415959A/ja
Publication of JPS6415959A publication Critical patent/JPS6415959A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP62171190A 1987-07-10 1987-07-10 Positioning device of semiconductor element Pending JPS6415959A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62171190A JPS6415959A (en) 1987-07-10 1987-07-10 Positioning device of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62171190A JPS6415959A (en) 1987-07-10 1987-07-10 Positioning device of semiconductor element

Publications (1)

Publication Number Publication Date
JPS6415959A true JPS6415959A (en) 1989-01-19

Family

ID=15918676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62171190A Pending JPS6415959A (en) 1987-07-10 1987-07-10 Positioning device of semiconductor element

Country Status (1)

Country Link
JP (1) JPS6415959A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997024913A1 (fr) * 1995-12-27 1997-07-10 Kabushiki Kaisha Shinano Electronics Procede de postionnement de circuits integres et dispositif manipulateur de circuits integres fonctionnant selon ce procede
US6691576B1 (en) 1999-08-04 2004-02-17 Asahi Engineering Co., Ltd. Thickness measuring device for cylindrical tank bottom plate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997024913A1 (fr) * 1995-12-27 1997-07-10 Kabushiki Kaisha Shinano Electronics Procede de postionnement de circuits integres et dispositif manipulateur de circuits integres fonctionnant selon ce procede
US6691576B1 (en) 1999-08-04 2004-02-17 Asahi Engineering Co., Ltd. Thickness measuring device for cylindrical tank bottom plate

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