JPS6415959A - Positioning device of semiconductor element - Google Patents
Positioning device of semiconductor elementInfo
- Publication number
- JPS6415959A JPS6415959A JP62171190A JP17119087A JPS6415959A JP S6415959 A JPS6415959 A JP S6415959A JP 62171190 A JP62171190 A JP 62171190A JP 17119087 A JP17119087 A JP 17119087A JP S6415959 A JPS6415959 A JP S6415959A
- Authority
- JP
- Japan
- Prior art keywords
- guide hole
- flat type
- vacuum pad
- semiconductor element
- size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62171190A JPS6415959A (en) | 1987-07-10 | 1987-07-10 | Positioning device of semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62171190A JPS6415959A (en) | 1987-07-10 | 1987-07-10 | Positioning device of semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6415959A true JPS6415959A (en) | 1989-01-19 |
Family
ID=15918676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62171190A Pending JPS6415959A (en) | 1987-07-10 | 1987-07-10 | Positioning device of semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6415959A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997024913A1 (fr) * | 1995-12-27 | 1997-07-10 | Kabushiki Kaisha Shinano Electronics | Procede de postionnement de circuits integres et dispositif manipulateur de circuits integres fonctionnant selon ce procede |
US6691576B1 (en) | 1999-08-04 | 2004-02-17 | Asahi Engineering Co., Ltd. | Thickness measuring device for cylindrical tank bottom plate |
-
1987
- 1987-07-10 JP JP62171190A patent/JPS6415959A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997024913A1 (fr) * | 1995-12-27 | 1997-07-10 | Kabushiki Kaisha Shinano Electronics | Procede de postionnement de circuits integres et dispositif manipulateur de circuits integres fonctionnant selon ce procede |
US6691576B1 (en) | 1999-08-04 | 2004-02-17 | Asahi Engineering Co., Ltd. | Thickness measuring device for cylindrical tank bottom plate |
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