JPS6414159U - - Google Patents

Info

Publication number
JPS6414159U
JPS6414159U JP11025587U JP11025587U JPS6414159U JP S6414159 U JPS6414159 U JP S6414159U JP 11025587 U JP11025587 U JP 11025587U JP 11025587 U JP11025587 U JP 11025587U JP S6414159 U JPS6414159 U JP S6414159U
Authority
JP
Japan
Prior art keywords
ion plating
plating apparatus
vacuum chamber
evaporation
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11025587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523566Y2 (US07166745-20070123-C00016.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11025587U priority Critical patent/JPH0523566Y2/ja
Publication of JPS6414159U publication Critical patent/JPS6414159U/ja
Application granted granted Critical
Publication of JPH0523566Y2 publication Critical patent/JPH0523566Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11025587U 1987-07-17 1987-07-17 Expired - Lifetime JPH0523566Y2 (US07166745-20070123-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11025587U JPH0523566Y2 (US07166745-20070123-C00016.png) 1987-07-17 1987-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11025587U JPH0523566Y2 (US07166745-20070123-C00016.png) 1987-07-17 1987-07-17

Publications (2)

Publication Number Publication Date
JPS6414159U true JPS6414159U (US07166745-20070123-C00016.png) 1989-01-25
JPH0523566Y2 JPH0523566Y2 (US07166745-20070123-C00016.png) 1993-06-16

Family

ID=31347248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11025587U Expired - Lifetime JPH0523566Y2 (US07166745-20070123-C00016.png) 1987-07-17 1987-07-17

Country Status (1)

Country Link
JP (1) JPH0523566Y2 (US07166745-20070123-C00016.png)

Also Published As

Publication number Publication date
JPH0523566Y2 (US07166745-20070123-C00016.png) 1993-06-16

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