Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Hitachi Ltd
Renesas Semiconductor Package and Test Solutions Co Ltd
Original Assignee
Hitachi Ltd
Hitachi Yonezawa Electronics Co Ltd
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Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Yonezawa Electronics Co LtdfiledCriticalHitachi Ltd
Priority to JP16874487ApriorityCriticalpatent/JPS6414037A/ja
Publication of JPS6414037ApublicationCriticalpatent/JPS6414037A/ja
Verfahren zum feststellen von referenzdaten zum zwecke der korrektur von mechanischen bewegungen beim schreiben von linien mit einem schreiblaserstrahl in einem metallisierten raster und vorrichtung zur durchfuehrung des verfahrens.