JPS6413661U - - Google Patents

Info

Publication number
JPS6413661U
JPS6413661U JP10765287U JP10765287U JPS6413661U JP S6413661 U JPS6413661 U JP S6413661U JP 10765287 U JP10765287 U JP 10765287U JP 10765287 U JP10765287 U JP 10765287U JP S6413661 U JPS6413661 U JP S6413661U
Authority
JP
Japan
Prior art keywords
implantation
implantation table
ion
substrate
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10765287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10765287U priority Critical patent/JPS6413661U/ja
Publication of JPS6413661U publication Critical patent/JPS6413661U/ja
Pending legal-status Critical Current

Links

JP10765287U 1987-07-15 1987-07-15 Pending JPS6413661U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10765287U JPS6413661U (enrdf_load_stackoverflow) 1987-07-15 1987-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10765287U JPS6413661U (enrdf_load_stackoverflow) 1987-07-15 1987-07-15

Publications (1)

Publication Number Publication Date
JPS6413661U true JPS6413661U (enrdf_load_stackoverflow) 1989-01-24

Family

ID=31342260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10765287U Pending JPS6413661U (enrdf_load_stackoverflow) 1987-07-15 1987-07-15

Country Status (1)

Country Link
JP (1) JPS6413661U (enrdf_load_stackoverflow)

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