JPS6413661U - - Google Patents
Info
- Publication number
- JPS6413661U JPS6413661U JP10765287U JP10765287U JPS6413661U JP S6413661 U JPS6413661 U JP S6413661U JP 10765287 U JP10765287 U JP 10765287U JP 10765287 U JP10765287 U JP 10765287U JP S6413661 U JPS6413661 U JP S6413661U
- Authority
- JP
- Japan
- Prior art keywords
- implantation
- implantation table
- ion
- substrate
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10765287U JPS6413661U (cs) | 1987-07-15 | 1987-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10765287U JPS6413661U (cs) | 1987-07-15 | 1987-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6413661U true JPS6413661U (cs) | 1989-01-24 |
Family
ID=31342260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10765287U Pending JPS6413661U (cs) | 1987-07-15 | 1987-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6413661U (cs) |
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1987
- 1987-07-15 JP JP10765287U patent/JPS6413661U/ja active Pending