JPS61123459U - - Google Patents
Info
- Publication number
- JPS61123459U JPS61123459U JP681385U JP681385U JPS61123459U JP S61123459 U JPS61123459 U JP S61123459U JP 681385 U JP681385 U JP 681385U JP 681385 U JP681385 U JP 681385U JP S61123459 U JPS61123459 U JP S61123459U
- Authority
- JP
- Japan
- Prior art keywords
- elastic body
- cooling
- wafers
- wafer
- cooling plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP681385U JPS61123459U (cs) | 1985-01-23 | 1985-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP681385U JPS61123459U (cs) | 1985-01-23 | 1985-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61123459U true JPS61123459U (cs) | 1986-08-04 |
Family
ID=30484600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP681385U Pending JPS61123459U (cs) | 1985-01-23 | 1985-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123459U (cs) |
-
1985
- 1985-01-23 JP JP681385U patent/JPS61123459U/ja active Pending