JPS6413443A - Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity value - Google Patents

Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity value

Info

Publication number
JPS6413443A
JPS6413443A JP61271092A JP27109286A JPS6413443A JP S6413443 A JPS6413443 A JP S6413443A JP 61271092 A JP61271092 A JP 61271092A JP 27109286 A JP27109286 A JP 27109286A JP S6413443 A JPS6413443 A JP S6413443A
Authority
JP
Japan
Prior art keywords
phases
values
respect
characteristic
picture elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61271092A
Other languages
Japanese (ja)
Inventor
Toyohiko Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP61271092A priority Critical patent/JPS6413443A/en
Publication of JPS6413443A publication Critical patent/JPS6413443A/en
Pending legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To enhance accuracy by setting plural phases A,...C corresponded to ranges of Ii(x,y) values different from each other with respect to a selected element (i), equally dividing the respective phases according to the Ii(x,y) values and calculating weight concns. based on the correction factor of one set determined with the respective phases. CONSTITUTION:An electron ray EB is projected to a sample 2 and the characteristic X-rays generated from the sample are stored in a memory device 4. A certain element (i) is then selected and the phases A, etc., corresponded to the ranges of the Ii(x,y) different from each other with respect to the (i) are set and the respective picture elements are equally divided. The characteristic X-ray intensity values with respect to the respective picture elements are then converted to relative intensity values and the correction factors are determined in accordance with the average values of the relative intensities of the respective elements with respect to the phases for each of the phases. The relative intensity values of the respective characteristic X-rays with respect to the respective picture elements are converted to the weight concn. values by using the correction factors of the phases to which the respective picture elements belong. Said values are displayed on a CRT 6. Computation are, therefore, simplified and the distribution of the weight concns. of the element is obtd. with good accuracy in a relatively short period of time.
JP61271092A 1986-11-14 1986-11-14 Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity value Pending JPS6413443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61271092A JPS6413443A (en) 1986-11-14 1986-11-14 Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity value

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61271092A JPS6413443A (en) 1986-11-14 1986-11-14 Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity value

Publications (1)

Publication Number Publication Date
JPS6413443A true JPS6413443A (en) 1989-01-18

Family

ID=17495246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61271092A Pending JPS6413443A (en) 1986-11-14 1986-11-14 Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity value

Country Status (1)

Country Link
JP (1) JPS6413443A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002062270A (en) * 2000-08-21 2002-02-28 Jeol Ltd Method of displaying face analysis data in surface analyzer using electron beam
JP2004163135A (en) * 2002-11-11 2004-06-10 Jeol Ltd X-ray analysis apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002062270A (en) * 2000-08-21 2002-02-28 Jeol Ltd Method of displaying face analysis data in surface analyzer using electron beam
JP2004163135A (en) * 2002-11-11 2004-06-10 Jeol Ltd X-ray analysis apparatus

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