JPS6413443A - Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity value - Google Patents
Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity valueInfo
- Publication number
- JPS6413443A JPS6413443A JP61271092A JP27109286A JPS6413443A JP S6413443 A JPS6413443 A JP S6413443A JP 61271092 A JP61271092 A JP 61271092A JP 27109286 A JP27109286 A JP 27109286A JP S6413443 A JPS6413443 A JP S6413443A
- Authority
- JP
- Japan
- Prior art keywords
- phases
- values
- respect
- characteristic
- picture elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To enhance accuracy by setting plural phases A,...C corresponded to ranges of Ii(x,y) values different from each other with respect to a selected element (i), equally dividing the respective phases according to the Ii(x,y) values and calculating weight concns. based on the correction factor of one set determined with the respective phases. CONSTITUTION:An electron ray EB is projected to a sample 2 and the characteristic X-rays generated from the sample are stored in a memory device 4. A certain element (i) is then selected and the phases A, etc., corresponded to the ranges of the Ii(x,y) different from each other with respect to the (i) are set and the respective picture elements are equally divided. The characteristic X-ray intensity values with respect to the respective picture elements are then converted to relative intensity values and the correction factors are determined in accordance with the average values of the relative intensities of the respective elements with respect to the phases for each of the phases. The relative intensity values of the respective characteristic X-rays with respect to the respective picture elements are converted to the weight concn. values by using the correction factors of the phases to which the respective picture elements belong. Said values are displayed on a CRT 6. Computation are, therefore, simplified and the distribution of the weight concns. of the element is obtd. with good accuracy in a relatively short period of time.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61271092A JPS6413443A (en) | 1986-11-14 | 1986-11-14 | Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity value |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61271092A JPS6413443A (en) | 1986-11-14 | 1986-11-14 | Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity value |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6413443A true JPS6413443A (en) | 1989-01-18 |
Family
ID=17495246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61271092A Pending JPS6413443A (en) | 1986-11-14 | 1986-11-14 | Method for measuring distribution of weight concentration based on data on characteristic x-ray intensity value |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6413443A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002062270A (en) * | 2000-08-21 | 2002-02-28 | Jeol Ltd | Method of displaying face analysis data in surface analyzer using electron beam |
JP2004163135A (en) * | 2002-11-11 | 2004-06-10 | Jeol Ltd | X-ray analysis apparatus |
-
1986
- 1986-11-14 JP JP61271092A patent/JPS6413443A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002062270A (en) * | 2000-08-21 | 2002-02-28 | Jeol Ltd | Method of displaying face analysis data in surface analyzer using electron beam |
JP2004163135A (en) * | 2002-11-11 | 2004-06-10 | Jeol Ltd | X-ray analysis apparatus |
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