JPS6412365U - - Google Patents
Info
- Publication number
- JPS6412365U JPS6412365U JP10690087U JP10690087U JPS6412365U JP S6412365 U JPS6412365 U JP S6412365U JP 10690087 U JP10690087 U JP 10690087U JP 10690087 U JP10690087 U JP 10690087U JP S6412365 U JPS6412365 U JP S6412365U
- Authority
- JP
- Japan
- Prior art keywords
- oven
- container
- ion source
- plasma generation
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10690087U JPS6412365U (es) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10690087U JPS6412365U (es) | 1987-07-10 | 1987-07-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6412365U true JPS6412365U (es) | 1989-01-23 |
Family
ID=31340823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10690087U Pending JPS6412365U (es) | 1987-07-10 | 1987-07-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6412365U (es) |
-
1987
- 1987-07-10 JP JP10690087U patent/JPS6412365U/ja active Pending