JPS6412362U - - Google Patents
Info
- Publication number
- JPS6412362U JPS6412362U JP10673987U JP10673987U JPS6412362U JP S6412362 U JPS6412362 U JP S6412362U JP 10673987 U JP10673987 U JP 10673987U JP 10673987 U JP10673987 U JP 10673987U JP S6412362 U JPS6412362 U JP S6412362U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- oven
- solid metal
- source chamber
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 3
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10673987U JPS6412362U (es) | 1987-07-11 | 1987-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10673987U JPS6412362U (es) | 1987-07-11 | 1987-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412362U true JPS6412362U (es) | 1989-01-23 |
Family
ID=31340522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10673987U Pending JPS6412362U (es) | 1987-07-11 | 1987-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412362U (es) |
-
1987
- 1987-07-11 JP JP10673987U patent/JPS6412362U/ja active Pending