JPS6412362U - - Google Patents
Info
- Publication number
- JPS6412362U JPS6412362U JP10673987U JP10673987U JPS6412362U JP S6412362 U JPS6412362 U JP S6412362U JP 10673987 U JP10673987 U JP 10673987U JP 10673987 U JP10673987 U JP 10673987U JP S6412362 U JPS6412362 U JP S6412362U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- oven
- solid metal
- source chamber
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 3
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の実施を示す。第２図は従来の
イオン源を示す。
１……イオン源室、２……バツフル、３……フ
イラメント、４……導入管、５……オーブンチヤ
ンバー、６……オーブン容器、７……加熱ヒータ
、８……熱電対、９……固体金属、１０……バツ
フル側導入管、１１……オーブン側導入管、１２
……カバー。
FIG. 1 shows the implementation of the invention. FIG. 2 shows a conventional ion source. DESCRIPTION OF SYMBOLS 1...Ion source chamber, 2...Battery, 3...Filament, 4...Introduction tube, 5...Oven chamber, 6...Oven container, 7...Heater, 8...Thermocouple, 9... ...Solid metal, 10...Bathful side introduction pipe, 11...Oven side introduction pipe, 12
……cover.
Claims (1)
上下方向に連結してなるイオン源において、固体
金属オーブンのオーブン容器よりイオン源室に達
する金属蒸気導入管を分割したもので構成して、
両導入管の対向端部を離間させることを特徴とす
るイオン源。 In an ion source in which an ion source chamber and a solid metal oven are vertically connected by a connection part, the metal vapor introduction pipe that reaches the ion source chamber from the oven container of the solid metal oven is divided,
An ion source characterized in that opposing ends of both introduction tubes are separated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10673987U JPS6412362U (en) | 1987-07-11 | 1987-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10673987U JPS6412362U (en) | 1987-07-11 | 1987-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412362U true JPS6412362U (en) | 1989-01-23 |
Family
ID=31340522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10673987U Pending JPS6412362U (en) | 1987-07-11 | 1987-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412362U (en) |
-
1987
- 1987-07-11 JP JP10673987U patent/JPS6412362U/ja active Pending