JPS6412365U - - Google Patents
Info
- Publication number
- JPS6412365U JPS6412365U JP10690087U JP10690087U JPS6412365U JP S6412365 U JPS6412365 U JP S6412365U JP 10690087 U JP10690087 U JP 10690087U JP 10690087 U JP10690087 U JP 10690087U JP S6412365 U JPS6412365 U JP S6412365U
- Authority
- JP
- Japan
- Prior art keywords
- oven
- container
- ion source
- plasma generation
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、この考案の一実施例に係るイオン源
を示す断面図である。第２図は、従来のイオン源
の一例を示す断面図である。
２……イオンビーム、６……ブラズマ生成容器
、１６……オーブン収納容器、１８……オーブン
、２０……シースヒータ、２２……イオン源物質
、２６……真空シール部、２８……真空排気口。
FIG. 1 is a sectional view showing an ion source according to an embodiment of this invention. FIG. 2 is a sectional view showing an example of a conventional ion source. 2...Ion beam, 6...Blasma generation container, 16...Oven storage container, 18...Oven, 20...Sheath heater, 22...Ion source material, 26...Vacuum seal section, 28...Vacuum exhaust port .
Claims (1)
その外壁にシースヒータがロー付けされたものを
プラズマ生成容器内に連通させると共に、当該オ
ーブンを同プラズマ生成容器に接続されたオーブ
ン収納容器内に収納した構造のイオン源において
、前記プラズマ生成容器とオーブン収納容器間に
両容器間を隔離する真空シール部を設けると共に
、オーブン収納容器に真空排気口を設けてそこか
ら当該容器内を真空排気するようにしたことを特
徴とするイオン源。 An oven for heating a solid ion source material, with a sheath heater brazed to its outer wall, is communicated with a plasma generation container, and the oven is housed in an oven storage container connected to the plasma generation container. In the ion source of this structure, a vacuum seal part is provided between the plasma generation container and the oven storage container to isolate the two containers, and a vacuum exhaust port is provided in the oven storage container to evacuate the inside of the container. An ion source characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10690087U JPS6412365U (en) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10690087U JPS6412365U (en) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412365U true JPS6412365U (en) | 1989-01-23 |
Family
ID=31340823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10690087U Pending JPS6412365U (en) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412365U (en) |
-
1987
- 1987-07-10 JP JP10690087U patent/JPS6412365U/ja active Pending