JPS6412211A - Non-contact shape measuring apparatus - Google Patents

Non-contact shape measuring apparatus

Info

Publication number
JPS6412211A
JPS6412211A JP62167500A JP16750087A JPS6412211A JP S6412211 A JPS6412211 A JP S6412211A JP 62167500 A JP62167500 A JP 62167500A JP 16750087 A JP16750087 A JP 16750087A JP S6412211 A JPS6412211 A JP S6412211A
Authority
JP
Japan
Prior art keywords
measuring
optical system
optical axis
axis
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62167500A
Other languages
Japanese (ja)
Other versions
JPH06103169B2 (en
Inventor
Mitsuru Ehashi
Munenobu Suzuki
Takayasu Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62167500A priority Critical patent/JPH06103169B2/en
Publication of JPS6412211A publication Critical patent/JPS6412211A/en
Publication of JPH06103169B2 publication Critical patent/JPH06103169B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To achieve a multi-item measurement of shapes simultaneously and in a short time, by arranging an interference optical system and an automatic collimation optical system securely on the same optical axis sandwiching a carrier base to allow the movement of the carrier base in various directions. CONSTITUTION:An interference optical system 40 and an automatic collimation optical system 30 are arranged to align relatively through an object 1 to be inspected. A stage mechanism 24 is provided to measure a 3-D movement of the object 1 and a mechanism 23 inverting centered on an axis vertical to the optical axis. The object 1 is held with a V-groove holder 22 on a stage and surfaces of the object 1 are made parallel with a measuring optical axis while the circumference of the object 1 as being placed is parallel with the measuring optical axis. The mechanism 24 is arranged parallel with the measuring optical axis in one axis of the rectangular coordinate while being made movable independently in tree axes thereof. Both the optical systems 30 and 40 are varied in the wavelength of a measuring light and the optical system to be used is determined by a measuring item. This enables multi-item measurement simultaneously and in a short time simply by operating the stage in a measuring sequence only after an object 1 being inspected is put on the holder.
JP62167500A 1987-07-03 1987-07-03 Non-contact shape measuring device Expired - Lifetime JPH06103169B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62167500A JPH06103169B2 (en) 1987-07-03 1987-07-03 Non-contact shape measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62167500A JPH06103169B2 (en) 1987-07-03 1987-07-03 Non-contact shape measuring device

Publications (2)

Publication Number Publication Date
JPS6412211A true JPS6412211A (en) 1989-01-17
JPH06103169B2 JPH06103169B2 (en) 1994-12-14

Family

ID=15850835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62167500A Expired - Lifetime JPH06103169B2 (en) 1987-07-03 1987-07-03 Non-contact shape measuring device

Country Status (1)

Country Link
JP (1) JPH06103169B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109579736A (en) * 2018-12-14 2019-04-05 中国科学院西安光学精密机械研究所 Cylindricity non-contact measuring device and method for precision workpiece
CN111102956A (en) * 2018-10-29 2020-05-05 株式会社三丰 Shape measuring device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111102956A (en) * 2018-10-29 2020-05-05 株式会社三丰 Shape measuring device
JP2020071060A (en) * 2018-10-29 2020-05-07 株式会社ミツトヨ Shape measuring device
CN111102956B (en) * 2018-10-29 2023-10-13 株式会社三丰 Shape measuring device
CN109579736A (en) * 2018-12-14 2019-04-05 中国科学院西安光学精密机械研究所 Cylindricity non-contact measuring device and method for precision workpiece

Also Published As

Publication number Publication date
JPH06103169B2 (en) 1994-12-14

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