JPS6412211A - Non-contact shape measuring apparatus - Google Patents
Non-contact shape measuring apparatusInfo
- Publication number
- JPS6412211A JPS6412211A JP62167500A JP16750087A JPS6412211A JP S6412211 A JPS6412211 A JP S6412211A JP 62167500 A JP62167500 A JP 62167500A JP 16750087 A JP16750087 A JP 16750087A JP S6412211 A JPS6412211 A JP S6412211A
- Authority
- JP
- Japan
- Prior art keywords
- measuring
- optical system
- optical axis
- axis
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To achieve a multi-item measurement of shapes simultaneously and in a short time, by arranging an interference optical system and an automatic collimation optical system securely on the same optical axis sandwiching a carrier base to allow the movement of the carrier base in various directions. CONSTITUTION:An interference optical system 40 and an automatic collimation optical system 30 are arranged to align relatively through an object 1 to be inspected. A stage mechanism 24 is provided to measure a 3-D movement of the object 1 and a mechanism 23 inverting centered on an axis vertical to the optical axis. The object 1 is held with a V-groove holder 22 on a stage and surfaces of the object 1 are made parallel with a measuring optical axis while the circumference of the object 1 as being placed is parallel with the measuring optical axis. The mechanism 24 is arranged parallel with the measuring optical axis in one axis of the rectangular coordinate while being made movable independently in tree axes thereof. Both the optical systems 30 and 40 are varied in the wavelength of a measuring light and the optical system to be used is determined by a measuring item. This enables multi-item measurement simultaneously and in a short time simply by operating the stage in a measuring sequence only after an object 1 being inspected is put on the holder.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62167500A JPH06103169B2 (en) | 1987-07-03 | 1987-07-03 | Non-contact shape measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62167500A JPH06103169B2 (en) | 1987-07-03 | 1987-07-03 | Non-contact shape measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6412211A true JPS6412211A (en) | 1989-01-17 |
JPH06103169B2 JPH06103169B2 (en) | 1994-12-14 |
Family
ID=15850835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62167500A Expired - Lifetime JPH06103169B2 (en) | 1987-07-03 | 1987-07-03 | Non-contact shape measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06103169B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109579736A (en) * | 2018-12-14 | 2019-04-05 | 中国科学院西安光学精密机械研究所 | Cylindricity non-contact measuring device and method for precision workpiece |
CN111102956A (en) * | 2018-10-29 | 2020-05-05 | 株式会社三丰 | Shape measuring device |
-
1987
- 1987-07-03 JP JP62167500A patent/JPH06103169B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111102956A (en) * | 2018-10-29 | 2020-05-05 | 株式会社三丰 | Shape measuring device |
JP2020071060A (en) * | 2018-10-29 | 2020-05-07 | 株式会社ミツトヨ | Shape measuring device |
CN111102956B (en) * | 2018-10-29 | 2023-10-13 | 株式会社三丰 | Shape measuring device |
CN109579736A (en) * | 2018-12-14 | 2019-04-05 | 中国科学院西安光学精密机械研究所 | Cylindricity non-contact measuring device and method for precision workpiece |
Also Published As
Publication number | Publication date |
---|---|
JPH06103169B2 (en) | 1994-12-14 |
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