JPS6411969A - Sputtering device - Google Patents
Sputtering deviceInfo
- Publication number
- JPS6411969A JPS6411969A JP16535187A JP16535187A JPS6411969A JP S6411969 A JPS6411969 A JP S6411969A JP 16535187 A JP16535187 A JP 16535187A JP 16535187 A JP16535187 A JP 16535187A JP S6411969 A JPS6411969 A JP S6411969A
- Authority
- JP
- Japan
- Prior art keywords
- permanent magnet
- magnetic metal
- target
- magnetron sputtering
- peripheral part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To reduce the quantity of permanent magnets and the manufacturing cost by arranging a magnetic metal on the inside of a permanent magnet on the reverse side of a target in a magnetron sputtering devise and bringing one end of the magnetic metal into contact with a permanent magnet to be magnetized. CONSTITUTION:When a permanent magnet for the center part and a permanent magnet for the peripheral part are arranged on the reverse side of target 2 as a film forming material to a base 3 in a magnetron sputtering device, Fe or other magnetic metal 6 on behalf of the permanent magnet for the center part is arranged, the magnetic metal 6 is magnetized by bringing its one end into contact with the permanent magnet 5 for the external peripheral part and at the same time, the part facing the target 2 of the magnetic metal 6 is operated as a magnetic pole. A permanent magnet of past complicated form composed of a permanent magnet for the peripheral part and a permanent magnet for the central part is not required, part of a permanent magnet on the rear of a target for a magnetron sputtering is substituted by a magnetic metal and, accordingly, the structure of permanent magnet is simplified and the cost of the permanent magnet also can be drastically reduced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16535187A JPS6411969A (en) | 1987-07-03 | 1987-07-03 | Sputtering device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16535187A JPS6411969A (en) | 1987-07-03 | 1987-07-03 | Sputtering device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6411969A true JPS6411969A (en) | 1989-01-17 |
Family
ID=15810709
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16535187A Pending JPS6411969A (en) | 1987-07-03 | 1987-07-03 | Sputtering device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6411969A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006224989A (en) * | 2005-02-17 | 2006-08-31 | Casio Comput Co Ltd | Fuel container |
-
1987
- 1987-07-03 JP JP16535187A patent/JPS6411969A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006224989A (en) * | 2005-02-17 | 2006-08-31 | Casio Comput Co Ltd | Fuel container |
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