JPS6411757A - Grinding machine - Google Patents

Grinding machine

Info

Publication number
JPS6411757A
JPS6411757A JP16438187A JP16438187A JPS6411757A JP S6411757 A JPS6411757 A JP S6411757A JP 16438187 A JP16438187 A JP 16438187A JP 16438187 A JP16438187 A JP 16438187A JP S6411757 A JPS6411757 A JP S6411757A
Authority
JP
Japan
Prior art keywords
centers
grinding wheels
workpiece
grinding
mounting plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16438187A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0325297B2 (enrdf_load_stackoverflow
Inventor
Tomoaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP16438187A priority Critical patent/JPS6411757A/ja
Publication of JPS6411757A publication Critical patent/JPS6411757A/ja
Publication of JPH0325297B2 publication Critical patent/JPH0325297B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP16438187A 1987-07-01 1987-07-01 Grinding machine Granted JPS6411757A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16438187A JPS6411757A (en) 1987-07-01 1987-07-01 Grinding machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16438187A JPS6411757A (en) 1987-07-01 1987-07-01 Grinding machine

Publications (2)

Publication Number Publication Date
JPS6411757A true JPS6411757A (en) 1989-01-17
JPH0325297B2 JPH0325297B2 (enrdf_load_stackoverflow) 1991-04-05

Family

ID=15792046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16438187A Granted JPS6411757A (en) 1987-07-01 1987-07-01 Grinding machine

Country Status (1)

Country Link
JP (1) JPS6411757A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031748U (enrdf_load_stackoverflow) * 1989-05-31 1991-01-09
JPH03221368A (ja) * 1989-11-10 1991-09-30 Fujikoshi Kikai Kogyo Kk ウエハー加工装置
US6068545A (en) * 1998-03-10 2000-05-30 Speedfam Co., Ltd. Workpiece surface processing apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031748U (enrdf_load_stackoverflow) * 1989-05-31 1991-01-09
JPH03221368A (ja) * 1989-11-10 1991-09-30 Fujikoshi Kikai Kogyo Kk ウエハー加工装置
US6068545A (en) * 1998-03-10 2000-05-30 Speedfam Co., Ltd. Workpiece surface processing apparatus
EP0941805A3 (en) * 1998-03-10 2002-06-05 SpeedFam-IPEC Inc. Workpiece surface processing apparatus

Also Published As

Publication number Publication date
JPH0325297B2 (enrdf_load_stackoverflow) 1991-04-05

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