JPS6411542U - - Google Patents
Info
- Publication number
- JPS6411542U JPS6411542U JP10498387U JP10498387U JPS6411542U JP S6411542 U JPS6411542 U JP S6411542U JP 10498387 U JP10498387 U JP 10498387U JP 10498387 U JP10498387 U JP 10498387U JP S6411542 U JPS6411542 U JP S6411542U
- Authority
- JP
- Japan
- Prior art keywords
- attracted
- conductor
- insulating film
- electrostatic chuck
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 3
- 238000005507 spraying Methods 0.000 claims 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987104983U JPH0636583Y2 (ja) | 1987-07-07 | 1987-07-07 | 静電チャック |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987104983U JPH0636583Y2 (ja) | 1987-07-07 | 1987-07-07 | 静電チャック |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6411542U true JPS6411542U (xx) | 1989-01-20 |
| JPH0636583Y2 JPH0636583Y2 (ja) | 1994-09-21 |
Family
ID=31337190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987104983U Expired - Lifetime JPH0636583Y2 (ja) | 1987-07-07 | 1987-07-07 | 静電チャック |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636583Y2 (xx) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04304942A (ja) * | 1991-03-29 | 1992-10-28 | Shin Etsu Chem Co Ltd | 静電チャック基板および静電チャック |
| JP2010272730A (ja) * | 2009-05-22 | 2010-12-02 | Shinko Electric Ind Co Ltd | 静電チャック |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230014758A (ko) * | 2021-02-04 | 2023-01-30 | 엔지케이 인슐레이터 엘티디 | 반도체 제조 장치용 부재 및 그 제법 |
| WO2022168368A1 (ja) * | 2021-02-04 | 2022-08-11 | 日本碍子株式会社 | 半導体製造装置用部材及びその製法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62286247A (ja) * | 1986-06-05 | 1987-12-12 | Toto Ltd | 静電チヤツク板及びその製造方法 |
-
1987
- 1987-07-07 JP JP1987104983U patent/JPH0636583Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62286247A (ja) * | 1986-06-05 | 1987-12-12 | Toto Ltd | 静電チヤツク板及びその製造方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04304942A (ja) * | 1991-03-29 | 1992-10-28 | Shin Etsu Chem Co Ltd | 静電チャック基板および静電チャック |
| JP2010272730A (ja) * | 2009-05-22 | 2010-12-02 | Shinko Electric Ind Co Ltd | 静電チャック |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0636583Y2 (ja) | 1994-09-21 |