JPS6411403U - - Google Patents

Info

Publication number
JPS6411403U
JPS6411403U JP10664187U JP10664187U JPS6411403U JP S6411403 U JPS6411403 U JP S6411403U JP 10664187 U JP10664187 U JP 10664187U JP 10664187 U JP10664187 U JP 10664187U JP S6411403 U JPS6411403 U JP S6411403U
Authority
JP
Japan
Prior art keywords
microhole
pneumatic circuit
sectional area
adjusting rod
predetermined cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10664187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10664187U priority Critical patent/JPS6411403U/ja
Publication of JPS6411403U publication Critical patent/JPS6411403U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pipe Accessories (AREA)
  • Fluid-Pressure Circuits (AREA)
JP10664187U 1987-07-10 1987-07-10 Pending JPS6411403U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10664187U JPS6411403U (cs) 1987-07-10 1987-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10664187U JPS6411403U (cs) 1987-07-10 1987-07-10

Publications (1)

Publication Number Publication Date
JPS6411403U true JPS6411403U (cs) 1989-01-20

Family

ID=31340334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10664187U Pending JPS6411403U (cs) 1987-07-10 1987-07-10

Country Status (1)

Country Link
JP (1) JPS6411403U (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7186314B2 (en) 2003-01-27 2007-03-06 Tokyo Electron Limited Plasma processor and plasma processing method
JP2011220447A (ja) * 2010-04-09 2011-11-04 Daikin Industries Ltd アクチュエータユニット及びそれを用いたシステム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178574A (en) * 1981-04-25 1982-11-02 Toshiba Corp Character pattern detecting and segmenting device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178574A (en) * 1981-04-25 1982-11-02 Toshiba Corp Character pattern detecting and segmenting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7186314B2 (en) 2003-01-27 2007-03-06 Tokyo Electron Limited Plasma processor and plasma processing method
JP2011220447A (ja) * 2010-04-09 2011-11-04 Daikin Industries Ltd アクチュエータユニット及びそれを用いたシステム

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