JPS6410664U - - Google Patents

Info

Publication number
JPS6410664U
JPS6410664U JP10579487U JP10579487U JPS6410664U JP S6410664 U JPS6410664 U JP S6410664U JP 10579487 U JP10579487 U JP 10579487U JP 10579487 U JP10579487 U JP 10579487U JP S6410664 U JPS6410664 U JP S6410664U
Authority
JP
Japan
Prior art keywords
conductivity type
piezoresistors
pair
well
bending part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10579487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648421Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987105794U priority Critical patent/JPH0648421Y2/ja
Publication of JPS6410664U publication Critical patent/JPS6410664U/ja
Application granted granted Critical
Publication of JPH0648421Y2 publication Critical patent/JPH0648421Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP1987105794U 1987-07-08 1987-07-08 半導体加速度センサ Expired - Lifetime JPH0648421Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987105794U JPH0648421Y2 (ja) 1987-07-08 1987-07-08 半導体加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987105794U JPH0648421Y2 (ja) 1987-07-08 1987-07-08 半導体加速度センサ

Publications (2)

Publication Number Publication Date
JPS6410664U true JPS6410664U (US20030220297A1-20031127-C00074.png) 1989-01-20
JPH0648421Y2 JPH0648421Y2 (ja) 1994-12-12

Family

ID=31338728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987105794U Expired - Lifetime JPH0648421Y2 (ja) 1987-07-08 1987-07-08 半導体加速度センサ

Country Status (1)

Country Link
JP (1) JPH0648421Y2 (US20030220297A1-20031127-C00074.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0587648A (ja) * 1991-09-30 1993-04-06 Nissan Motor Co Ltd 半導体応力検出装置
JPH0587649A (ja) * 1991-09-30 1993-04-06 Nissan Motor Co Ltd 半導体応力検出装置
JP2001304997A (ja) * 2000-04-27 2001-10-31 Toyota Central Res & Dev Lab Inc 半導体圧力センサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113157A (ja) * 1983-10-28 1985-06-19 ハネウエル・インコーポレーテッド 加速度計
JPS61139758A (ja) * 1984-12-12 1986-06-27 Nissan Motor Co Ltd 半導体加速度センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113157A (ja) * 1983-10-28 1985-06-19 ハネウエル・インコーポレーテッド 加速度計
JPS61139758A (ja) * 1984-12-12 1986-06-27 Nissan Motor Co Ltd 半導体加速度センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0587648A (ja) * 1991-09-30 1993-04-06 Nissan Motor Co Ltd 半導体応力検出装置
JPH0587649A (ja) * 1991-09-30 1993-04-06 Nissan Motor Co Ltd 半導体応力検出装置
JP2001304997A (ja) * 2000-04-27 2001-10-31 Toyota Central Res & Dev Lab Inc 半導体圧力センサ

Also Published As

Publication number Publication date
JPH0648421Y2 (ja) 1994-12-12

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