JPS6410664U - - Google Patents
Info
- Publication number
- JPS6410664U JPS6410664U JP10579487U JP10579487U JPS6410664U JP S6410664 U JPS6410664 U JP S6410664U JP 10579487 U JP10579487 U JP 10579487U JP 10579487 U JP10579487 U JP 10579487U JP S6410664 U JPS6410664 U JP S6410664U
- Authority
- JP
- Japan
- Prior art keywords
- conductivity type
- piezoresistors
- pair
- well
- bending part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987105794U JPH0648421Y2 (ja) | 1987-07-08 | 1987-07-08 | 半導体加速度センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987105794U JPH0648421Y2 (ja) | 1987-07-08 | 1987-07-08 | 半導体加速度センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6410664U true JPS6410664U (US06582424-20030624-M00016.png) | 1989-01-20 |
| JPH0648421Y2 JPH0648421Y2 (ja) | 1994-12-12 |
Family
ID=31338728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987105794U Expired - Lifetime JPH0648421Y2 (ja) | 1987-07-08 | 1987-07-08 | 半導体加速度センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648421Y2 (US06582424-20030624-M00016.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0587648A (ja) * | 1991-09-30 | 1993-04-06 | Nissan Motor Co Ltd | 半導体応力検出装置 |
| JPH0587649A (ja) * | 1991-09-30 | 1993-04-06 | Nissan Motor Co Ltd | 半導体応力検出装置 |
| JP2001304997A (ja) * | 2000-04-27 | 2001-10-31 | Toyota Central Res & Dev Lab Inc | 半導体圧力センサ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60113157A (ja) * | 1983-10-28 | 1985-06-19 | ハネウエル・インコーポレーテッド | 加速度計 |
| JPS61139758A (ja) * | 1984-12-12 | 1986-06-27 | Nissan Motor Co Ltd | 半導体加速度センサ |
-
1987
- 1987-07-08 JP JP1987105794U patent/JPH0648421Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60113157A (ja) * | 1983-10-28 | 1985-06-19 | ハネウエル・インコーポレーテッド | 加速度計 |
| JPS61139758A (ja) * | 1984-12-12 | 1986-06-27 | Nissan Motor Co Ltd | 半導体加速度センサ |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0587648A (ja) * | 1991-09-30 | 1993-04-06 | Nissan Motor Co Ltd | 半導体応力検出装置 |
| JPH0587649A (ja) * | 1991-09-30 | 1993-04-06 | Nissan Motor Co Ltd | 半導体応力検出装置 |
| JP2001304997A (ja) * | 2000-04-27 | 2001-10-31 | Toyota Central Res & Dev Lab Inc | 半導体圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648421Y2 (ja) | 1994-12-12 |
