JPS6410234A - Photopolymerizable negative type resist - Google Patents
Photopolymerizable negative type resistInfo
- Publication number
- JPS6410234A JPS6410234A JP16596487A JP16596487A JPS6410234A JP S6410234 A JPS6410234 A JP S6410234A JP 16596487 A JP16596487 A JP 16596487A JP 16596487 A JP16596487 A JP 16596487A JP S6410234 A JPS6410234 A JP S6410234A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- titled
- photopolymerizable
- group
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
PURPOSE:To obtain the titled resist having the excellent anti-etching and resist peeling properties, by incorporating a photopolymerizable polymer having a polyfunctional ethylenic unsatd. group at a side chain or an end group in a combination with a specified high polymer having a prescribed mol.wt., in the titled resist. CONSTITUTION:The titled resist contains a photopolymerizable composition composed of the photopolymerizable polymer having the polyfunctional ethylenic unsatd. group at the side chain or the end group, and a copolymer which has a structural unit composed of methacrylic acid and the structural unit composed of methyl methacrylate and a weight average mol.wt. of 10,000-500,000, and the compd. which has a b.p. of >=100 deg.C, at a normal pressure, and contains >=2 polymerizable end ethylenic groups, and a photopolymerizable initiator capable of activating by an active ray. The titled resist can be developed with an aqueous alkaline solution or said solution contg. a small amount of an org. solvent, and the sensitivity and the anti-etching and the resist peeling properties of the titled resist are improved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16596487A JPS6410234A (en) | 1987-07-02 | 1987-07-02 | Photopolymerizable negative type resist |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16596487A JPS6410234A (en) | 1987-07-02 | 1987-07-02 | Photopolymerizable negative type resist |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410234A true JPS6410234A (en) | 1989-01-13 |
Family
ID=15822355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16596487A Pending JPS6410234A (en) | 1987-07-02 | 1987-07-02 | Photopolymerizable negative type resist |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410234A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0584780A2 (en) * | 1992-08-28 | 1994-03-02 | Hitachi, Ltd. | Process for producing printed wiring board |
-
1987
- 1987-07-02 JP JP16596487A patent/JPS6410234A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0584780A2 (en) * | 1992-08-28 | 1994-03-02 | Hitachi, Ltd. | Process for producing printed wiring board |
| EP0584780A3 (en) * | 1992-08-28 | 1995-08-02 | Hitachi Ltd | Process for producing printed wiring board. |
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