JPS6410044B2 - - Google Patents
Info
- Publication number
- JPS6410044B2 JPS6410044B2 JP18673981A JP18673981A JPS6410044B2 JP S6410044 B2 JPS6410044 B2 JP S6410044B2 JP 18673981 A JP18673981 A JP 18673981A JP 18673981 A JP18673981 A JP 18673981A JP S6410044 B2 JPS6410044 B2 JP S6410044B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- photodetector
- regular pattern
- defect
- photodetector array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 52
- 230000002950 deficient Effects 0.000 claims description 12
- 238000007689 inspection Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 238000001914 filtration Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 238000003491 array Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 7
- 230000001360 synchronised effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56186739A JPS5887531A (ja) | 1981-11-20 | 1981-11-20 | 規則性パタ−ンの欠陥検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56186739A JPS5887531A (ja) | 1981-11-20 | 1981-11-20 | 規則性パタ−ンの欠陥検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5887531A JPS5887531A (ja) | 1983-05-25 |
| JPS6410044B2 true JPS6410044B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-21 |
Family
ID=16193799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56186739A Granted JPS5887531A (ja) | 1981-11-20 | 1981-11-20 | 規則性パタ−ンの欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5887531A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6122624A (ja) * | 1984-07-11 | 1986-01-31 | Hitachi Ltd | 外観検査装置 |
| JP2007033263A (ja) * | 2005-07-27 | 2007-02-08 | Nagasaki Univ | 微小凹面形状の形状誤差機上計測方法および計測装置 |
| JP2008000248A (ja) * | 2006-06-21 | 2008-01-10 | Yamazaki Corp | 清掃具 |
-
1981
- 1981-11-20 JP JP56186739A patent/JPS5887531A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5887531A (ja) | 1983-05-25 |