JPS6410043B2 - - Google Patents

Info

Publication number
JPS6410043B2
JPS6410043B2 JP18673881A JP18673881A JPS6410043B2 JP S6410043 B2 JPS6410043 B2 JP S6410043B2 JP 18673881 A JP18673881 A JP 18673881A JP 18673881 A JP18673881 A JP 18673881A JP S6410043 B2 JPS6410043 B2 JP S6410043B2
Authority
JP
Japan
Prior art keywords
pattern
defect
photodetector array
fourier transform
regular pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18673881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5887530A (ja
Inventor
Shunsuke Mukasa
Kennosuke Sugizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP56186738A priority Critical patent/JPS5887530A/ja
Publication of JPS5887530A publication Critical patent/JPS5887530A/ja
Publication of JPS6410043B2 publication Critical patent/JPS6410043B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP56186738A 1981-11-20 1981-11-20 規則性パタ−ンの欠陥検査装置 Granted JPS5887530A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56186738A JPS5887530A (ja) 1981-11-20 1981-11-20 規則性パタ−ンの欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56186738A JPS5887530A (ja) 1981-11-20 1981-11-20 規則性パタ−ンの欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5887530A JPS5887530A (ja) 1983-05-25
JPS6410043B2 true JPS6410043B2 (en:Method) 1989-02-21

Family

ID=16193779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56186738A Granted JPS5887530A (ja) 1981-11-20 1981-11-20 規則性パタ−ンの欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS5887530A (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061875Y2 (ja) * 1985-04-26 1994-01-19 マツダ株式会社 自動車のリヤシ−ト装置
US4806774A (en) * 1987-06-08 1989-02-21 Insystems, Inc. Inspection system for array of microcircuit dies having redundant circuit patterns

Also Published As

Publication number Publication date
JPS5887530A (ja) 1983-05-25

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