JPS6399752U - - Google Patents
Info
- Publication number
- JPS6399752U JPS6399752U JP19515086U JP19515086U JPS6399752U JP S6399752 U JPS6399752 U JP S6399752U JP 19515086 U JP19515086 U JP 19515086U JP 19515086 U JP19515086 U JP 19515086U JP S6399752 U JPS6399752 U JP S6399752U
- Authority
- JP
- Japan
- Prior art keywords
- suppressor electrode
- faraday cage
- ion beam
- surround
- target chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19515086U JPS6399752U (en, 2012) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19515086U JPS6399752U (en, 2012) | 1986-12-18 | 1986-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6399752U true JPS6399752U (en, 2012) | 1988-06-28 |
Family
ID=31152775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19515086U Pending JPS6399752U (en, 2012) | 1986-12-18 | 1986-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6399752U (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008128660A (ja) * | 2006-11-16 | 2008-06-05 | Nissin Ion Equipment Co Ltd | イオンビーム計測装置 |
| JP2011187309A (ja) * | 2010-03-09 | 2011-09-22 | Nissin Ion Equipment Co Ltd | イオンビーム照射装置 |
| JP2019212598A (ja) * | 2018-06-01 | 2019-12-12 | 日新イオン機器株式会社 | イオンビーム照射装置 |
-
1986
- 1986-12-18 JP JP19515086U patent/JPS6399752U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008128660A (ja) * | 2006-11-16 | 2008-06-05 | Nissin Ion Equipment Co Ltd | イオンビーム計測装置 |
| JP2011187309A (ja) * | 2010-03-09 | 2011-09-22 | Nissin Ion Equipment Co Ltd | イオンビーム照射装置 |
| JP2019212598A (ja) * | 2018-06-01 | 2019-12-12 | 日新イオン機器株式会社 | イオンビーム照射装置 |