JPS6399752U - - Google Patents

Info

Publication number
JPS6399752U
JPS6399752U JP19515086U JP19515086U JPS6399752U JP S6399752 U JPS6399752 U JP S6399752U JP 19515086 U JP19515086 U JP 19515086U JP 19515086 U JP19515086 U JP 19515086U JP S6399752 U JPS6399752 U JP S6399752U
Authority
JP
Japan
Prior art keywords
suppressor electrode
faraday cage
ion beam
surround
target chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19515086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19515086U priority Critical patent/JPS6399752U/ja
Publication of JPS6399752U publication Critical patent/JPS6399752U/ja
Pending legal-status Critical Current

Links

JP19515086U 1986-12-18 1986-12-18 Pending JPS6399752U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19515086U JPS6399752U (US08063081-20111122-C00044.png) 1986-12-18 1986-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19515086U JPS6399752U (US08063081-20111122-C00044.png) 1986-12-18 1986-12-18

Publications (1)

Publication Number Publication Date
JPS6399752U true JPS6399752U (US08063081-20111122-C00044.png) 1988-06-28

Family

ID=31152775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19515086U Pending JPS6399752U (US08063081-20111122-C00044.png) 1986-12-18 1986-12-18

Country Status (1)

Country Link
JP (1) JPS6399752U (US08063081-20111122-C00044.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008128660A (ja) * 2006-11-16 2008-06-05 Nissin Ion Equipment Co Ltd イオンビーム計測装置
JP2011187309A (ja) * 2010-03-09 2011-09-22 Nissin Ion Equipment Co Ltd イオンビーム照射装置
JP2019212598A (ja) * 2018-06-01 2019-12-12 日新イオン機器株式会社 イオンビーム照射装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008128660A (ja) * 2006-11-16 2008-06-05 Nissin Ion Equipment Co Ltd イオンビーム計測装置
JP4605146B2 (ja) * 2006-11-16 2011-01-05 日新イオン機器株式会社 イオンビーム計測装置
JP2011187309A (ja) * 2010-03-09 2011-09-22 Nissin Ion Equipment Co Ltd イオンビーム照射装置
JP2019212598A (ja) * 2018-06-01 2019-12-12 日新イオン機器株式会社 イオンビーム照射装置

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