JPS6399252U - - Google Patents
Info
- Publication number
- JPS6399252U JPS6399252U JP19641986U JP19641986U JPS6399252U JP S6399252 U JPS6399252 U JP S6399252U JP 19641986 U JP19641986 U JP 19641986U JP 19641986 U JP19641986 U JP 19641986U JP S6399252 U JPS6399252 U JP S6399252U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- pellet
- circuit network
- electrical connection
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000008188 pellet Substances 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の実施例を、一部破断して示す
斜視図、第２図Ａは従来例を示す断面図、第２図
Ｂは同要部平面図である。 １…圧力センサペレツト、１０…アルミナセラ
ミツクス基板、１２…回路網。
斜視図、第２図Ａは従来例を示す断面図、第２図
Ｂは同要部平面図である。 １…圧力センサペレツト、１０…アルミナセラ
ミツクス基板、１２…回路網。
Claims (1)
- 回路網を形成したアルミナセラミツクス基板に
シリコンダイアフラム型圧力センサペレツトを固
定すると共に、該ペレツトと上記回路網との間の
電気的結合をなしたことを特徴とする圧力センサ
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986196419U JPH0539473Y2 (ja) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986196419U JPH0539473Y2 (ja) | 1986-12-19 | 1986-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6399252U true JPS6399252U (ja) | 1988-06-27 |
| JPH0539473Y2 JPH0539473Y2 (ja) | 1993-10-06 |
Family
ID=31155223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986196419U Expired - Lifetime JPH0539473Y2 (ja) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0539473Y2 (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524423A (en) * | 1978-08-10 | 1980-02-21 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
| JPS61230383A (ja) * | 1985-04-05 | 1986-10-14 | Yokogawa Electric Corp | 半導体センサ |
-
1986
- 1986-12-19 JP JP1986196419U patent/JPH0539473Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524423A (en) * | 1978-08-10 | 1980-02-21 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
| JPS61230383A (ja) * | 1985-04-05 | 1986-10-14 | Yokogawa Electric Corp | 半導体センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0539473Y2 (ja) | 1993-10-06 |