JPS6398369U - - Google Patents
Info
- Publication number
- JPS6398369U JPS6398369U JP19473286U JP19473286U JPS6398369U JP S6398369 U JPS6398369 U JP S6398369U JP 19473286 U JP19473286 U JP 19473286U JP 19473286 U JP19473286 U JP 19473286U JP S6398369 U JPS6398369 U JP S6398369U
- Authority
- JP
- Japan
- Prior art keywords
- processing time
- breakdown
- additional processing
- etching
- calculation means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015556 catabolic process Effects 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 5
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19473286U JPS6398369U (enExample) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19473286U JPS6398369U (enExample) | 1986-12-18 | 1986-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6398369U true JPS6398369U (enExample) | 1988-06-25 |
Family
ID=31151974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19473286U Pending JPS6398369U (enExample) | 1986-12-18 | 1986-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398369U (enExample) |
-
1986
- 1986-12-18 JP JP19473286U patent/JPS6398369U/ja active Pending
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