JPS6396522U - - Google Patents
Info
- Publication number
- JPS6396522U JPS6396522U JP19060486U JP19060486U JPS6396522U JP S6396522 U JPS6396522 U JP S6396522U JP 19060486 U JP19060486 U JP 19060486U JP 19060486 U JP19060486 U JP 19060486U JP S6396522 U JPS6396522 U JP S6396522U
- Authority
- JP
- Japan
- Prior art keywords
- speed
- aerial image
- image
- imaged
- best focus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Description
第１図は本案の実施例の概略図、第２図はレテ
イクルのパターンを示す図、第３図、第４図は対
物レンズの位置とＣＣＤの信号の関係を表わす図
である。
１……レテイクル、２……レテイクル・パター
ン、３……縮小レンズ、４……対物レンズ、５…
…ＣＣＤ、６……検出光学系移動用ＸＹステージ
、７……ベスト・フオーカス位置、８……光電変
換波形。
FIG. 1 is a schematic diagram of an embodiment of the present invention, FIG. 2 is a diagram showing a reticle pattern, and FIGS. 3 and 4 are diagrams showing the relationship between the position of the objective lens and the CCD signal. 1... Reticle, 2... Reticle pattern, 3... Reduction lens, 4... Objective lens, 5...
...CCD, 6...XY stage for moving the detection optical system, 7...Best focus position, 8...Photoelectric conversion waveform.
Claims (1)
させて、空中像の形成されている位置で、該空中
像を光電変換し、該波形パターンのエツジ立ち上
がりの緩急により、ベスト・フオーカス位置を検
出することを特徴とする像面測定機。 A specific pattern is transmitted and imaged through the test lens, the aerial image is photoelectrically converted at the position where the aerial image is formed, and the best focus position is detected by the speed and speed of the edge rise of the waveform pattern. An image plane measuring device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19060486U JPS6396522U (en) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19060486U JPS6396522U (en) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6396522U true JPS6396522U (en) | 1988-06-22 |
Family
ID=31143978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19060486U Pending JPS6396522U (en) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6396522U (en) |
-
1986
- 1986-12-12 JP JP19060486U patent/JPS6396522U/ja active Pending
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