JPS6395241U - - Google Patents

Info

Publication number
JPS6395241U
JPS6395241U JP19061986U JP19061986U JPS6395241U JP S6395241 U JPS6395241 U JP S6395241U JP 19061986 U JP19061986 U JP 19061986U JP 19061986 U JP19061986 U JP 19061986U JP S6395241 U JPS6395241 U JP S6395241U
Authority
JP
Japan
Prior art keywords
wafer
utility
transfer device
model registration
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19061986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19061986U priority Critical patent/JPS6395241U/ja
Publication of JPS6395241U publication Critical patent/JPS6395241U/ja
Pending legal-status Critical Current

Links

Landscapes

  • De-Stacking Of Articles (AREA)
JP19061986U 1986-12-12 1986-12-12 Pending JPS6395241U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19061986U JPS6395241U (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19061986U JPS6395241U (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Publications (1)

Publication Number Publication Date
JPS6395241U true JPS6395241U (enrdf_load_stackoverflow) 1988-06-20

Family

ID=31144009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19061986U Pending JPS6395241U (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Country Status (1)

Country Link
JP (1) JPS6395241U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126648A (ja) * 1988-11-07 1990-05-15 Tokyo Electron Ltd 処理装置
JPH0366928U (enrdf_load_stackoverflow) * 1989-10-31 1991-06-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126648A (ja) * 1988-11-07 1990-05-15 Tokyo Electron Ltd 処理装置
JPH0366928U (enrdf_load_stackoverflow) * 1989-10-31 1991-06-28

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