JPH02118927U - - Google Patents

Info

Publication number
JPH02118927U
JPH02118927U JP2778289U JP2778289U JPH02118927U JP H02118927 U JPH02118927 U JP H02118927U JP 2778289 U JP2778289 U JP 2778289U JP 2778289 U JP2778289 U JP 2778289U JP H02118927 U JPH02118927 U JP H02118927U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
support means
semiconductor
horizontal direction
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2778289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2778289U priority Critical patent/JPH02118927U/ja
Publication of JPH02118927U publication Critical patent/JPH02118927U/ja
Pending legal-status Critical Current

Links

JP2778289U 1989-03-09 1989-03-09 Pending JPH02118927U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2778289U JPH02118927U (enrdf_load_stackoverflow) 1989-03-09 1989-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2778289U JPH02118927U (enrdf_load_stackoverflow) 1989-03-09 1989-03-09

Publications (1)

Publication Number Publication Date
JPH02118927U true JPH02118927U (enrdf_load_stackoverflow) 1990-09-25

Family

ID=31250578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2778289U Pending JPH02118927U (enrdf_load_stackoverflow) 1989-03-09 1989-03-09

Country Status (1)

Country Link
JP (1) JPH02118927U (enrdf_load_stackoverflow)

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