JPS6395239U - - Google Patents
Info
- Publication number
- JPS6395239U JPS6395239U JP19008386U JP19008386U JPS6395239U JP S6395239 U JPS6395239 U JP S6395239U JP 19008386 U JP19008386 U JP 19008386U JP 19008386 U JP19008386 U JP 19008386U JP S6395239 U JPS6395239 U JP S6395239U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- inspection
- carrying
- positioning means
- aligning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 7
- 238000011179 visual inspection Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19008386U JPS6395239U (en, 2012) | 1986-12-10 | 1986-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19008386U JPS6395239U (en, 2012) | 1986-12-10 | 1986-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6395239U true JPS6395239U (en, 2012) | 1988-06-20 |
Family
ID=31142971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19008386U Pending JPS6395239U (en, 2012) | 1986-12-10 | 1986-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6395239U (en, 2012) |
-
1986
- 1986-12-10 JP JP19008386U patent/JPS6395239U/ja active Pending
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