JPS6395239U - - Google Patents

Info

Publication number
JPS6395239U
JPS6395239U JP19008386U JP19008386U JPS6395239U JP S6395239 U JPS6395239 U JP S6395239U JP 19008386 U JP19008386 U JP 19008386U JP 19008386 U JP19008386 U JP 19008386U JP S6395239 U JPS6395239 U JP S6395239U
Authority
JP
Japan
Prior art keywords
wafer
inspection
carrying
positioning means
aligning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19008386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19008386U priority Critical patent/JPS6395239U/ja
Publication of JPS6395239U publication Critical patent/JPS6395239U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP19008386U 1986-12-10 1986-12-10 Pending JPS6395239U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19008386U JPS6395239U (US20020051482A1-20020502-M00012.png) 1986-12-10 1986-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19008386U JPS6395239U (US20020051482A1-20020502-M00012.png) 1986-12-10 1986-12-10

Publications (1)

Publication Number Publication Date
JPS6395239U true JPS6395239U (US20020051482A1-20020502-M00012.png) 1988-06-20

Family

ID=31142971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19008386U Pending JPS6395239U (US20020051482A1-20020502-M00012.png) 1986-12-10 1986-12-10

Country Status (1)

Country Link
JP (1) JPS6395239U (US20020051482A1-20020502-M00012.png)

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