JPS6394961U - - Google Patents
Info
- Publication number
- JPS6394961U JPS6394961U JP19045986U JP19045986U JPS6394961U JP S6394961 U JPS6394961 U JP S6394961U JP 19045986 U JP19045986 U JP 19045986U JP 19045986 U JP19045986 U JP 19045986U JP S6394961 U JPS6394961 U JP S6394961U
- Authority
- JP
- Japan
- Prior art keywords
- holding member
- substrate holding
- substrate
- sputtering
- earth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims 3
- 230000002159 abnormal effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19045986U JPS6394961U (enExample) | 1986-12-10 | 1986-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19045986U JPS6394961U (enExample) | 1986-12-10 | 1986-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6394961U true JPS6394961U (enExample) | 1988-06-18 |
Family
ID=31143696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19045986U Pending JPS6394961U (enExample) | 1986-12-10 | 1986-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6394961U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5137148A (ja) * | 1974-09-25 | 1976-03-29 | Toyo Boseki | Fuhowahoriesuterujushisoseibutsu |
-
1986
- 1986-12-10 JP JP19045986U patent/JPS6394961U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5137148A (ja) * | 1974-09-25 | 1976-03-29 | Toyo Boseki | Fuhowahoriesuterujushisoseibutsu |