JPS6393631U - - Google Patents
Info
- Publication number
- JPS6393631U JPS6393631U JP18677486U JP18677486U JPS6393631U JP S6393631 U JPS6393631 U JP S6393631U JP 18677486 U JP18677486 U JP 18677486U JP 18677486 U JP18677486 U JP 18677486U JP S6393631 U JPS6393631 U JP S6393631U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- light
- pattern
- photoelectric conversion
- conversion element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18677486U JPS6393631U (de) | 1986-12-05 | 1986-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18677486U JPS6393631U (de) | 1986-12-05 | 1986-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6393631U true JPS6393631U (de) | 1988-06-17 |
Family
ID=31136638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18677486U Pending JPS6393631U (de) | 1986-12-05 | 1986-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6393631U (de) |
-
1986
- 1986-12-05 JP JP18677486U patent/JPS6393631U/ja active Pending
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