JPS639131U - - Google Patents
Info
- Publication number
- JPS639131U JPS639131U JP10162086U JP10162086U JPS639131U JP S639131 U JPS639131 U JP S639131U JP 10162086 U JP10162086 U JP 10162086U JP 10162086 U JP10162086 U JP 10162086U JP S639131 U JPS639131 U JP S639131U
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- scattering
- sub
- shaped bottom
- cup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000002265 prevention Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 9
- 238000011084 recovery Methods 0.000 claims 2
- 239000002699 waste material Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 235000015067 sauces Nutrition 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10162086U JPH0238440Y2 (cg-RX-API-DMAC10.html) | 1986-07-02 | 1986-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10162086U JPH0238440Y2 (cg-RX-API-DMAC10.html) | 1986-07-02 | 1986-07-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS639131U true JPS639131U (cg-RX-API-DMAC10.html) | 1988-01-21 |
| JPH0238440Y2 JPH0238440Y2 (cg-RX-API-DMAC10.html) | 1990-10-17 |
Family
ID=30972511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10162086U Expired JPH0238440Y2 (cg-RX-API-DMAC10.html) | 1986-07-02 | 1986-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238440Y2 (cg-RX-API-DMAC10.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09152718A (ja) * | 1995-11-28 | 1997-06-10 | Dainippon Screen Mfg Co Ltd | 現像装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001319849A (ja) * | 2000-05-08 | 2001-11-16 | Tokyo Electron Ltd | 液処理装置及び液処理方法 |
-
1986
- 1986-07-02 JP JP10162086U patent/JPH0238440Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09152718A (ja) * | 1995-11-28 | 1997-06-10 | Dainippon Screen Mfg Co Ltd | 現像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0238440Y2 (cg-RX-API-DMAC10.html) | 1990-10-17 |