JPS6391152U - - Google Patents
Info
- Publication number
- JPS6391152U JPS6391152U JP18547086U JP18547086U JPS6391152U JP S6391152 U JPS6391152 U JP S6391152U JP 18547086 U JP18547086 U JP 18547086U JP 18547086 U JP18547086 U JP 18547086U JP S6391152 U JPS6391152 U JP S6391152U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- chamber
- exchange device
- sample exchange
- raising
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18547086U JPS6391152U (el) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18547086U JPS6391152U (el) | 1986-12-03 | 1986-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6391152U true JPS6391152U (el) | 1988-06-13 |
Family
ID=31134126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18547086U Pending JPS6391152U (el) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6391152U (el) |
-
1986
- 1986-12-03 JP JP18547086U patent/JPS6391152U/ja active Pending