JPS6390843U - - Google Patents
Info
- Publication number
- JPS6390843U JPS6390843U JP18632086U JP18632086U JPS6390843U JP S6390843 U JPS6390843 U JP S6390843U JP 18632086 U JP18632086 U JP 18632086U JP 18632086 U JP18632086 U JP 18632086U JP S6390843 U JPS6390843 U JP S6390843U
- Authority
- JP
- Japan
- Prior art keywords
- pedestal
- beams
- wafer cassette
- pair
- leg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 210000001364 upper extremity Anatomy 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18632086U JPS6390843U (it) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18632086U JPS6390843U (it) | 1986-12-03 | 1986-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390843U true JPS6390843U (it) | 1988-06-13 |
Family
ID=31135768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18632086U Pending JPS6390843U (it) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390843U (it) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60157230A (ja) * | 1984-01-11 | 1985-08-17 | Telmec Co Ltd | 半導体ウエハ搬送方法 |
-
1986
- 1986-12-03 JP JP18632086U patent/JPS6390843U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60157230A (ja) * | 1984-01-11 | 1985-08-17 | Telmec Co Ltd | 半導体ウエハ搬送方法 |