JPS6390831U - - Google Patents
Info
- Publication number
- JPS6390831U JPS6390831U JP18582886U JP18582886U JPS6390831U JP S6390831 U JPS6390831 U JP S6390831U JP 18582886 U JP18582886 U JP 18582886U JP 18582886 U JP18582886 U JP 18582886U JP S6390831 U JPS6390831 U JP S6390831U
- Authority
- JP
- Japan
- Prior art keywords
- separated
- drying device
- semiconductor wafers
- helichlorotrichloroethane
- freon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18582886U JPS6390831U (enExample) | 1986-12-01 | 1986-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18582886U JPS6390831U (enExample) | 1986-12-01 | 1986-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390831U true JPS6390831U (enExample) | 1988-06-13 |
Family
ID=31134821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18582886U Pending JPS6390831U (enExample) | 1986-12-01 | 1986-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390831U (enExample) |
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1986
- 1986-12-01 JP JP18582886U patent/JPS6390831U/ja active Pending