JPS6390831U - - Google Patents

Info

Publication number
JPS6390831U
JPS6390831U JP18582886U JP18582886U JPS6390831U JP S6390831 U JPS6390831 U JP S6390831U JP 18582886 U JP18582886 U JP 18582886U JP 18582886 U JP18582886 U JP 18582886U JP S6390831 U JPS6390831 U JP S6390831U
Authority
JP
Japan
Prior art keywords
separated
drying device
semiconductor wafers
helichlorotrichloroethane
freon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18582886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18582886U priority Critical patent/JPS6390831U/ja
Publication of JPS6390831U publication Critical patent/JPS6390831U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP18582886U 1986-12-01 1986-12-01 Pending JPS6390831U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18582886U JPS6390831U (enrdf_load_stackoverflow) 1986-12-01 1986-12-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18582886U JPS6390831U (enrdf_load_stackoverflow) 1986-12-01 1986-12-01

Publications (1)

Publication Number Publication Date
JPS6390831U true JPS6390831U (enrdf_load_stackoverflow) 1988-06-13

Family

ID=31134821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18582886U Pending JPS6390831U (enrdf_load_stackoverflow) 1986-12-01 1986-12-01

Country Status (1)

Country Link
JP (1) JPS6390831U (enrdf_load_stackoverflow)

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