JPS6390828U - - Google Patents
Info
- Publication number
- JPS6390828U JPS6390828U JP18624886U JP18624886U JPS6390828U JP S6390828 U JPS6390828 U JP S6390828U JP 18624886 U JP18624886 U JP 18624886U JP 18624886 U JP18624886 U JP 18624886U JP S6390828 U JPS6390828 U JP S6390828U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- furnace body
- mounting base
- disposed
- boat mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18624886U JPS6390828U (pt) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18624886U JPS6390828U (pt) | 1986-12-03 | 1986-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390828U true JPS6390828U (pt) | 1988-06-13 |
Family
ID=31135631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18624886U Pending JPS6390828U (pt) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390828U (pt) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48103088A (pt) * | 1972-04-12 | 1973-12-24 | ||
| JPS5571616A (en) * | 1978-11-20 | 1980-05-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Vapor phase growing treatment method |
| JPS60140814A (ja) * | 1983-12-28 | 1985-07-25 | Fujitsu Ltd | 半導体製造装置 |
-
1986
- 1986-12-03 JP JP18624886U patent/JPS6390828U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48103088A (pt) * | 1972-04-12 | 1973-12-24 | ||
| JPS5571616A (en) * | 1978-11-20 | 1980-05-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Vapor phase growing treatment method |
| JPS60140814A (ja) * | 1983-12-28 | 1985-07-25 | Fujitsu Ltd | 半導体製造装置 |