JPS6390828U - - Google Patents
Info
- Publication number
- JPS6390828U JPS6390828U JP18624886U JP18624886U JPS6390828U JP S6390828 U JPS6390828 U JP S6390828U JP 18624886 U JP18624886 U JP 18624886U JP 18624886 U JP18624886 U JP 18624886U JP S6390828 U JPS6390828 U JP S6390828U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- furnace body
- mounting base
- disposed
- boat mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
Description
第１図はこの考案の一実施例の縦型半導体熱処
理炉の断面図、第２図は炉体の断面図、第３図は
第１図の―線矢視図、第４図は噛み合い部材
の正面図、第５図は第２図の―線断面図、第
６図は従来の断面図である。
１１…炉体、１２…チユーブ、１６…ヒータ、
１５…回転機構、５５…ボート支持台。
Fig. 1 is a sectional view of a vertical semiconductor heat treatment furnace according to an embodiment of this invention, Fig. 2 is a sectional view of the furnace body, Fig. 3 is a view taken along the line - in Fig. 1, and Fig. 4 is an interlocking member. FIG. 5 is a sectional view taken along the line -- in FIG. 2, and FIG. 6 is a conventional sectional view. 11... Furnace body, 12... Tube, 16... Heater,
15...Rotation mechanism, 55...Boat support stand.
Claims (1)
タと、上記炉体内に配置され、ガス導入口を有す
るチユーブと、上記チユーブ内に配置されたボー
ト取付台と、上記ボート取付台を回転軸のまわり
に公転させると共に自転させる回転機構を備えた
ことを特徴とする縦型半導体熱処理炉。 A furnace body, a heater fixed to the inner periphery of a side wall of the furnace body, a tube disposed within the furnace body and having a gas inlet, a boat mounting base disposed within the tube, and a boat mounting base disposed within the tube. A vertical semiconductor heat treatment furnace characterized by being equipped with a rotation mechanism that revolves around a rotation axis and rotates on its own axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18624886U JPS6390828U (en) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18624886U JPS6390828U (en) | 1986-12-03 | 1986-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390828U true JPS6390828U (en) | 1988-06-13 |
Family
ID=31135631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18624886U Pending JPS6390828U (en) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390828U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48103088A (en) * | 1972-04-12 | 1973-12-24 | ||
| JPS5571616A (en) * | 1978-11-20 | 1980-05-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Vapor phase growing treatment method |
| JPS60140814A (en) * | 1983-12-28 | 1985-07-25 | Fujitsu Ltd | Production equipment for semiconductor |
-
1986
- 1986-12-03 JP JP18624886U patent/JPS6390828U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48103088A (en) * | 1972-04-12 | 1973-12-24 | ||
| JPS5571616A (en) * | 1978-11-20 | 1980-05-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Vapor phase growing treatment method |
| JPS60140814A (en) * | 1983-12-28 | 1985-07-25 | Fujitsu Ltd | Production equipment for semiconductor |