JPS639021A - Apparatus for producing magnetic recording medium - Google Patents

Apparatus for producing magnetic recording medium

Info

Publication number
JPS639021A
JPS639021A JP15065686A JP15065686A JPS639021A JP S639021 A JPS639021 A JP S639021A JP 15065686 A JP15065686 A JP 15065686A JP 15065686 A JP15065686 A JP 15065686A JP S639021 A JPS639021 A JP S639021A
Authority
JP
Japan
Prior art keywords
magnetic recording
recording medium
roll
metal layer
coiling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15065686A
Other languages
Japanese (ja)
Inventor
Noboru Isoe
磯江 昇
Tetsuo Mizumura
哲夫 水村
Hideaki Niimi
秀明 新見
Kunio Wakai
若居 邦夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Ltd filed Critical Hitachi Maxell Ltd
Priority to JP15065686A priority Critical patent/JPS639021A/en
Publication of JPS639021A publication Critical patent/JPS639021A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve corrosion resistance and running property by subjecting a roll coiling a magnetic recording medium of a substrate formed with a ferromagnetic metallic layer to a heat treatment in an atmosphere where oxygen and moisture exist and specifying the surface roughness and coiling tension at the time of coiling. CONSTITUTION:Slight spaces 13 are formed to respective stages of the magnetic recording media of the coiled roll 10 by adjusting the tension onto a base film 1 at the time of coiling and the tape-like magnetic recording media are held in multiple stages of proximity positions via such spaces 13. The roll is disposed in the atmosphere where the oxygen and moisture exist, by which the roll is heat-treated. The oxygen and moisture are uniformly infiltrated and diffused between the surfaces of the ferromagnetic metallic layers 12 of the magnetic recording media and the base films 1 in proximity to the front faces of the ferromagnetic metallic layers. The average surface roughness (Ra) of the substrate surface is, therefore, desired to be in a 0.001mum<=Ra<=0.05mum and the coiling tension T thereof to be in the following range: 1kg/mm<2>. The corrosion resistance and running property of the magnetic recording medium are thus improved.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は磁気記録媒体の製造装置に係り、特に磁性層形
成後、基体をロール状に巻いた状態で磁性層に対して酸
化被膜を形成する磁気記録媒体の製造装置に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an apparatus for manufacturing a magnetic recording medium, and in particular, after forming a magnetic layer, an oxide film is formed on the magnetic layer while the substrate is wound into a roll. The present invention relates to an apparatus for manufacturing a magnetic recording medium.

〔従来の技術〕[Conventional technology]

プラスチックフィルムなどの非磁性基体上にコバルト又
はコバルト合金などの強磁性金属層を形成した磁気記録
媒体は、高密度記録特性に優れている。しかし磁気記録
媒体表面に金属層が露出しているため耐食性が低く、こ
のため磁気特性が低下したり、腐食生成物の成長によっ
て媒体表面の耐久性が減少し、走行不良を生じる等の問
題がある。このため従来から磁気特性低下の防止及び走
行性改善のための方法が何種か提案されている。
A magnetic recording medium in which a ferromagnetic metal layer such as cobalt or a cobalt alloy is formed on a nonmagnetic substrate such as a plastic film has excellent high-density recording characteristics. However, since the metal layer is exposed on the surface of the magnetic recording medium, its corrosion resistance is low, resulting in problems such as a decline in magnetic properties and the growth of corrosion products, which reduces the durability of the medium surface and causes poor running. be. For this reason, several methods have been proposed to prevent deterioration of magnetic properties and improve running performance.

先ず、走行性能改善のため、強磁性金属層表面に対して
潤滑剤から成る保護層を形成することが提案されている
。−船に強磁性金属層に対して潤滑剤からなる保護層を
直接形成した磁気テープをカセットに組み込んだ状態で
、40℃、80%R9H1の条件で実用テストを行うと
、この磁気テープは数時間後には走行不良を起こしてし
まう。この原因を調べてみると、摩擦係数が増大し、大
きい場合にはこの摩擦係数が1.0以上にもなっている
。つまり腐食生成物の成長によって短時間で潤滑効果が
なくなっており、摩擦係数は経時的に増大していること
が判明した。
First, in order to improve running performance, it has been proposed to form a protective layer made of a lubricant on the surface of a ferromagnetic metal layer. - When a practical test was carried out under the conditions of 40°C and 80% R9H1 with a magnetic tape in which a protective layer made of lubricant was directly formed on the ferromagnetic metal layer installed in a cassette on a ship, it was found that this magnetic tape After some time, it will cause poor running. When we investigated the cause of this, we found that the coefficient of friction increases, and in some cases, this coefficient of friction exceeds 1.0. In other words, it was found that the lubricating effect was lost in a short period of time due to the growth of corrosion products, and the friction coefficient increased over time.

また、磁気記録媒体の耐摩耗性、耐食性を改善するため
、強磁性金属層の表面を加熱し、これによってC020
4、COx 03及びCoo等の酸化被膜を形成する方
法(特公昭49−29445号公報)、強磁性金属層を
適当な温度と湿度の雰囲気中で処理すことにより酸化被
膜としてCo、O,を形成する方法(特公昭42−20
025号公報)、また更に強磁性金属層の表面に対し1
00℃以上の水蒸気を吹付けて層表面に結晶性のCoo
 (OH)を形成する方法(特開昭57−123533
号公報)等種々の方法、装置が提案されている。
In addition, in order to improve the wear resistance and corrosion resistance of magnetic recording media, the surface of the ferromagnetic metal layer is heated, thereby reducing the C020
4. Method for forming oxide films such as COx 03 and Coo (Japanese Patent Publication No. 49-29445), by treating a ferromagnetic metal layer in an atmosphere of appropriate temperature and humidity, Co, O, etc. can be formed as an oxide film. Method of forming
025), and furthermore, 1 to the surface of the ferromagnetic metal layer.
Spraying water vapor at 00°C or higher to form crystalline Coo on the surface of the layer.
Method for forming (OH) (JP-A-57-123533
Various methods and devices have been proposed.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

以上に示した技術は何れも強磁性金属層を形成した基体
を、その強磁性金属層表面が所定の雰囲気下に解放配置
されるようにして実施されるため、水蒸気等、酸化を促
進する材料がこの強磁性金属層表面に対して必要以上に
供給され、処理時若しくは処理後に強磁性金属層表面に
対してCo(OH)z層が形成され、耐食性、走行性を
余り向上させることができず、却って悪化させる場合も
ある。
In all of the above-mentioned techniques, a substrate on which a ferromagnetic metal layer is formed is placed in such a way that the surface of the ferromagnetic metal layer is exposed to a predetermined atmosphere. is supplied to the surface of this ferromagnetic metal layer more than necessary, and a Co(OH)z layer is formed on the surface of the ferromagnetic metal layer during or after the treatment, and the corrosion resistance and runnability cannot be significantly improved. In some cases, it may even make things worse.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は上述の問題点に鑑み構成したものであり、強磁
性金属層を形成した基体たる磁気記録媒体を巻き取り、
この巻き取った磁気記録媒体を酸素及び水分が存在する
雰囲気下で熱処理するよう構成した装置であり、磁気記
録媒体巻き取り時の巻き取り張力、磁気記録媒体表面粗
さ等を適当に設定することにより、巻き取り状態で強磁
性金属層に対して酸化被膜を良好に形成するよう構成し
である。
The present invention was constructed in view of the above-mentioned problems, and involves winding up a magnetic recording medium as a base on which a ferromagnetic metal layer is formed.
This device is configured to heat-treat the wound magnetic recording medium in an atmosphere containing oxygen and moisture, and the winding tension and surface roughness of the magnetic recording medium are appropriately set when winding the magnetic recording medium. Accordingly, the structure is such that an oxide film can be formed satisfactorily on the ferromagnetic metal layer in the rolled state.

〔作用〕[Effect]

磁気記録媒体巻き取り時の巻き取り張力、磁気記録媒体
表面粗さ等を適当に設定することにより、巻き取られた
磁気記録媒体の強磁性金属層表面に酸素、水分等の酸化
材料が過不足なく浸潤して拡散し、これにより、強磁性
金属層表面に対して均一に酸化被膜が形成され、十分な
耐食性、走行性が得られる。
By appropriately setting the winding tension when winding the magnetic recording medium, the surface roughness of the magnetic recording medium, etc., it is possible to prevent excess or deficiency of oxidizing materials such as oxygen and moisture on the surface of the ferromagnetic metal layer of the wound magnetic recording medium. As a result, an oxide film is uniformly formed on the surface of the ferromagnetic metal layer, and sufficient corrosion resistance and runnability are obtained.

〔実施列〕[Implementation row]

以下本発明の実施例につき図面を参考に詳細に説明する
Embodiments of the present invention will be described in detail below with reference to the drawings.

先ず基体に対する強磁性金属層の形成状態を第1図を用
いて説明する。
First, the state of formation of the ferromagnetic metal layer on the substrate will be explained with reference to FIG.

基体は連続的に形成したフィルム(以下「ベースフィル
ム」と称する)1であり、原反ロール2として巻いであ
る。原反ロール2から繰り出されたベースフィルム1は
テンションローラ3により所定の張力を加えられ、ガイ
ドローラ4、同5を経て円筒状のキャン6に巻きつけら
れ、更にガイドローラ7.8及びテンションローラ9を
経て巻き取りロールlOに巻き取られる。この間に、キ
ャン6の下方に位置する蒸発源であるるつぼ11から例
えばコバルト−ニッケル合金から成る強磁性金属が蒸発
しベースフィルム表面に付着し、ベースフィルム1に対
して強磁性金属層12を形成する(第2図参照)。この
巻き取りロールとして巻き取られた状態の強磁性金属層
形成ベースフィルムに対して、水蒸気等の酸化用の材料
を供給することにより、以後詳細に説明するように強磁
性金属層に対して良好に酸化被膜を形成する。
The substrate is a continuously formed film (hereinafter referred to as "base film") 1, which is wound as a raw roll 2. A predetermined tension is applied to the base film 1 unwound from the original roll 2 by a tension roller 3, and the base film 1 is wound around a cylindrical can 6 via guide rollers 4 and 5, and further passed through a guide roller 7.8 and a tension roller. 9 and then wound onto a take-up roll IO. During this time, a ferromagnetic metal made of, for example, a cobalt-nickel alloy is evaporated from the crucible 11, which is an evaporation source located below the can 6, and adheres to the surface of the base film, forming a ferromagnetic metal layer 12 on the base film 1. (See Figure 2). By supplying an oxidizing material such as water vapor to the ferromagnetic metal layer-forming base film wound up as a take-up roll, it is possible to improve the ferromagnetic metal layer as described in detail below. Forms an oxide film on the surface.

ここで先ずベースフィルムを形成する非磁性材料として
は、例えばポリエチレンテレフタレート樹脂、ポリイミ
ド樹脂、ポリエステル樹脂等のプラスチックシートの他
、アルミニウム等の非磁性金属板やガラス等も使用可能
であり、更にはプラスチック基板の中に炭素繊維等の無
機物を混入した複合材料等も用いられる。
First, as the non-magnetic material for forming the base film, for example, in addition to plastic sheets such as polyethylene terephthalate resin, polyimide resin, and polyester resin, non-magnetic metal plates such as aluminum, glass, etc. can be used, and even plastics can be used. Composite materials in which inorganic substances such as carbon fibers are mixed into the substrate are also used.

またコバルトを主成分とする強磁性金属としては、例工
ばコバルト単体、コバルト−ニッケル合金、コバルト−
クロム合金、コバルト−ニッケル+ IJン合金、コバ
ルト−クロム合金、コバルトー鉄合金、コバルト−リン
合金、コバルト−ニッケルークロム合金等のコバルト合
金が用いられる。
Examples of ferromagnetic metals containing cobalt as a main component include simple cobalt, cobalt-nickel alloy, and cobalt-nickel alloy.
Cobalt alloys such as chromium alloy, cobalt-nickel+IJn alloy, cobalt-chromium alloy, cobalt-iron alloy, cobalt-phosphorous alloy, cobalt-nickel-chromium alloy, etc. are used.

なお前記コバルト−ニッケル合金及びコバルト−ニッケ
ルーリン合金、コバルトm;フケルークロム合金の場合
にはニッケルの含有率は約40重量%以下が望ましい。
In the case of the cobalt-nickel alloy, cobalt-nickel-phosphorus alloy, and cobalt-metal-chromium alloy, the nickel content is preferably about 40% by weight or less.

またコバルト−クロム合金、コバルト−鉄合金及びコバ
ルト−リン合金の場合にはクロム、鉄並びにリン含有率
は約30重量%以下が望ましい。
In the case of cobalt-chromium alloys, cobalt-iron alloys, and cobalt-phosphorus alloys, the chromium, iron, and phosphorus contents are preferably about 30% by weight or less.

潤滑剤としては、例えば脂肪酸系有機化合物、フッ素系
有機化合物並びにシリコン系有機化合物等が用いられる
As the lubricant, for example, a fatty acid-based organic compound, a fluorine-based organic compound, a silicon-based organic compound, etc. are used.

先ず脂肪酸系有機化合物としては脂肪酸、脂肪酸の金属
塩、脂肪酸エステル並びに脂肪酸アミド等が使用される
。前記脂肪酸の具体例としては、例えば、ミリスチン酸
、パルミチン酸、オレイン酸、ステアリン酸、ベヘン酸
等がある。またこれらの金属塩としては例えばリチウム
塩、ナトリウム塩、カルシウム塩、マグネシウム塩、ア
ルミニウム塩、鉄塩、コバルト塩、亜鉛塩、バリウム塩
並びに鉛塩等がある。
First, as the fatty acid-based organic compound, fatty acids, metal salts of fatty acids, fatty acid esters, fatty acid amides, etc. are used. Specific examples of the fatty acids include myristic acid, palmitic acid, oleic acid, stearic acid, and behenic acid. Examples of these metal salts include lithium salts, sodium salts, calcium salts, magnesium salts, aluminum salts, iron salts, cobalt salts, zinc salts, barium salts, and lead salts.

脂肪酸エステルとしては、例えばステアリン酸ブチル、
ステアリン酸モノグリセリド、パルミチン酸モノグリセ
リド、オレイン酸モノグリセリド、ペンタエリストール
テトラステアレート等がある。
Examples of fatty acid esters include butyl stearate,
Examples include stearic acid monoglyceride, palmitic acid monoglyceride, oleic acid monoglyceride, and pentaerythol tetrastearate.

脂肪酸アミドとしては、例えばカプロン酸アミド、カプ
リン酸アミド、ラウリン酸アミド、パルミチン酸アミド
、ベヘン酸アミド、オレイン酸アミド、リノール酸アミ
ド、メチレンビスステアリン酸アミド等がある。
Examples of fatty acid amides include caproic acid amide, capric acid amide, lauric acid amide, palmitic acid amide, behenic acid amide, oleic acid amide, linoleic acid amide, methylene bisstearic acid amide, and the like.

またフッ素系潤滑剤としては、例えばトリクロロフルオ
ロエチレン、パーフルオロポリエーテル、パーフルオロ
アルキルポリエーテル等がある。市販品の具体例として
はダイキン社製ダイフロン#20、デュポン社製クライ
トツクスM、同りライトックスH等がある。またシリコ
ン系の潤滑剤としてはシリコンオイルがある。
Examples of fluorine-based lubricants include trichlorofluoroethylene, perfluoropolyether, and perfluoroalkyl polyether. Specific examples of commercially available products include Daiflon #20 manufactured by Daikin Corporation, Krytox M manufactured by DuPont, and Krytox H manufactured by DuPont. Silicone oil is also available as a silicone-based lubricant.

なお前記潤滑剤層は上述のような潤滑剤のみで構成する
場合もあるし、潤滑剤中に例えば流動パラフィンや防錆
剤のような添加剤を混在させて、潤滑剤層の耐食性等を
向上させることも可能である。また潤滑剤層は直接前記
酸化被膜上に塗布形成するか、或いは転写法等により酸
化被膜上に形成してもよい。
Note that the lubricant layer may be composed only of the above-mentioned lubricant, or the lubricant may be mixed with additives such as liquid paraffin or rust preventive to improve the corrosion resistance of the lubricant layer. It is also possible to do so. Further, the lubricant layer may be formed by coating directly on the oxide film, or may be formed on the oxide film by a transfer method or the like.

以上において具体的に示した構成によりベースフィルム
に対して強磁性金属層を形成した磁気記録媒体をロール
状に巻き取った状態のままで、こノールを少なくとも酸
素と水分の存在する雰囲気下で熱処理を行うと、強磁性
金属層表面に3価以上の高次のコバルトを含むコバルト
含水酸化物が形成され、強磁性金属膜表面のCo(○H
)zの生成を抑制し、高耐食性を有し、高温、高圧下で
も安定した走行特性を有する磁気記録媒体を得ることが
できることを確認した。
While the magnetic recording medium with the ferromagnetic metal layer formed on the base film according to the configuration specifically shown above is wound up into a roll, the nol is heat-treated in an atmosphere containing at least oxygen and moisture. When this is carried out, a cobalt hydrated oxide containing trivalent or higher cobalt is formed on the surface of the ferromagnetic metal layer, and Co(○H) on the surface of the ferromagnetic metal film is formed.
) It was confirmed that it is possible to obtain a magnetic recording medium that suppresses the formation of z, has high corrosion resistance, and has stable running characteristics even under high temperature and high pressure.

以下更に具体的に説明する。This will be explained in more detail below.

強磁性金属層を形成したベースフィルムから成る磁気記
録媒体をロール状に巻くことにより、第3図に示すよう
にロールの半径方向に対して磁気記録媒体のベースフィ
ルムと強磁性金属層とが隣接する。この場合、巻き取り
時のベースフィルムに対する張力を調節する事により巻
き取りロール10の各段の磁気記録媒体に対しては僅か
な隙間13を形成し、この隙間13を介してテープ状の
磁気記録媒体が多数段近接位置する状態となる。
By winding a magnetic recording medium consisting of a base film on which a ferromagnetic metal layer is formed into a roll, the base film of the magnetic recording medium and the ferromagnetic metal layer are adjacent to each other in the radial direction of the roll, as shown in Figure 3. do. In this case, by adjusting the tension on the base film during winding, a slight gap 13 is formed between the magnetic recording media in each stage of the winding roll 10, and the tape-shaped magnetic recording medium is A state is reached in which multiple stages of media are located close to each other.

このロールは酸素(大気中の酸素でよい)と水分の存在
する雰囲気下に配置され熱処理される。これにより磁気
記録媒体の強磁性金属層12の表面と、この強磁性金属
層正面に近接するベースフィルム1との間には前記酸素
と水分が均一に浸潤、拡散される。このため酸素、水分
等の供給速度と反応速度とは平衡的に進行する。なおこ
の拡散量は、基体たるベースフィルムの表面粗さと巻き
取り時の張力により制御することができる。この場合、
基体表面の平均表面粗さくRa)は0.001μm≦R
a≦0.05μm、最大表面粗さくRmax)は、Rm
a x≦0.5μmが望ましい。
The roll is placed in an atmosphere containing oxygen (which may be atmospheric oxygen) and moisture and is heat treated. As a result, the oxygen and moisture are uniformly infiltrated and diffused between the surface of the ferromagnetic metal layer 12 of the magnetic recording medium and the base film 1 adjacent to the front side of the ferromagnetic metal layer. Therefore, the supply rate of oxygen, moisture, etc. and the reaction rate proceed in equilibrium. Note that this amount of diffusion can be controlled by the surface roughness of the base film serving as the substrate and the tension at the time of winding. in this case,
The average surface roughness (Ra) of the substrate surface is 0.001 μm≦R
a≦0.05μm, maximum surface roughness Rmax) is Rm
It is desirable that a x≦0.5 μm.

Ra<0.001.Ijmではロールとした磁気記録媒
体において酸素と水分の拡散が十分に行われず、Ra>
0.05μmまたはRmax>0.5μmでは水分の拡
散量が多過ぎ、処理中に磁気記録媒体の表面にCo(O
H)z層が形成されてしまう。基体表面粗さが小さい程
基体巻き取り時の張力を小さくして各磁気記録媒体間の
隙間を適当に保持する必要があり、基体表面粗さが大き
ければその分巻き取り時の張力を大きくすることができ
る。この場合、巻き取り張力を余り小さくすると巻乱れ
が生じ1、反対に大き過ぎると強磁性金属層にクラフク
が入ったり、ビルトアップが生じるため、その巻き取り
張力Tは次の範囲にあることが望ましい。
Ra<0.001. In Ijm, oxygen and moisture do not diffuse sufficiently in the rolled magnetic recording medium, and Ra>
At 0.05 μm or Rmax > 0.5 μm, the amount of water diffusion is too large, and Co(O
H) A z layer is formed. The smaller the substrate surface roughness, the smaller the tension when winding the substrate to maintain an appropriate gap between each magnetic recording medium, and the larger the substrate surface roughness, the greater the tension when winding. be able to. In this case, if the winding tension is too small, winding irregularities will occur1, whereas if it is too large, cracks or build-up will occur in the ferromagnetic metal layer, so the winding tension T should be within the following range. desirable.

1 kg/ w” ≦T ≦5 kg/ w”熱処理温
度と時間は基体の熱伝導特性によっても異なるが、温度
が高いほど処理時間は短くて済む。基体としてポリエチ
レンテレフタレートを用いた場合には処理温度は35℃
〜100℃、望ましくは40℃〜90℃である。35℃
以下であると処理効果はなく、反対に100℃よりも高
いと基体のカールがひどく、処理後の磁気記録媒体の実
用性が極端に低下する。
1 kg/w" ≦T ≦5 kg/w" The heat treatment temperature and time vary depending on the heat conduction properties of the substrate, but the higher the temperature, the shorter the treatment time. When polyethylene terephthalate is used as the substrate, the processing temperature is 35°C.
-100°C, preferably 40°C - 90°C. 35℃
If the temperature is below 100° C., there will be no treatment effect, whereas if the temperature is higher than 100° C., the substrate will curl severely and the practicality of the magnetic recording medium after treatment will be extremely reduced.

発明者等は以上に示した構成に基づいて得られた磁気記
録媒体を40℃、湿度80%R,H,中に暴露した時の
基体の表面平均粗さRaとエンベロープ乱れ発生までの
時間との関係、基体の巻き取り張力とエンベロープ乱れ
発生までの時間との関係に付いて試験を行い次表に示す
結果を得た。
The inventors have investigated the average surface roughness Ra of the substrate and the time until envelope disturbance occurs when the magnetic recording medium obtained based on the configuration shown above is exposed to temperatures of 40° C. and humidity of 80% R and H. Tests were conducted on the relationship between the winding tension of the substrate and the time until envelope disturbance occurs, and the results shown in the following table were obtained.

先ず基体の表面平均粗さRaとエンベロープ乱れ発生ま
での時間との関係は次の通りである。この際の基体の巻
き取り張力Tは3kg/mm2 とし、処理時間は10
0時間、処理温度は60℃とした。
First, the relationship between the surface average roughness Ra of the substrate and the time until envelope disturbance occurs is as follows. At this time, the winding tension T of the substrate was 3 kg/mm2, and the processing time was 10
The treatment temperature was 60° C. for 0 hours.

なおこのときの湿度は10%R,H,であった。Note that the humidity at this time was 10% R, H.

表    1 次に基体の巻き取り張力とエンベロープ乱れ発生までの
時間との関係に付いては次の結果を得た。
Table 1 Next, regarding the relationship between the winding tension of the substrate and the time until the occurrence of envelope disturbance, the following results were obtained.

なおこの場合、平均表面粗さRaは0.03、処理時間
は75時間、処理温度は80℃とした。またこのときの
湿度は8%R,H,であった。
In this case, the average surface roughness Ra was 0.03, the treatment time was 75 hours, and the treatment temperature was 80°C. Moreover, the humidity at this time was 8% R,H.

表    2 以上ベースフィルムに対して蒸着法により強磁性金属層
を形成することにより構成した磁気記録媒体の処理を例
に本発明を説明したが、本発明は磁気記録媒体の製造方
法の如何に関わりな〈実施可能であり、前記蒸着法によ
るものの外、スパッタ法、メッキ法、イオンブレーティ
ング法等により構成された磁気記録媒体に対しても良好
に実施することができる。
Table 2 Although the present invention has been explained above using as an example the treatment of a magnetic recording medium constructed by forming a ferromagnetic metal layer on a base film by vapor deposition, the present invention does not relate to any method of manufacturing a magnetic recording medium. It is possible to carry out this method, and it can be successfully carried out for magnetic recording media constructed by sputtering, plating, ion blating, etc. in addition to the above-mentioned vapor deposition method.

〔効果〕〔effect〕

本発明は以上に説明したように強磁性金属層を形成した
基体たる磁気記録媒体を巻き取ったロールを酸素及び水
分が存在する雰囲気下で熱処理するよう構成したので、
巻き取り状態で強磁性金属層に対して酸化被膜を良好に
形成することができる。また磁気記録媒体巻き取り時の
巻き取り張力、磁気記録媒体表面粗さ等を適当に設定す
ることにより、巻き取られる磁気記録媒体の強磁性金属
層表面に酸素、水分等の酸化材料が過不足なく拡散でき
、強磁性金属層に対して良好な酸化被膜を形成、できる
。このため磁気記録媒体の耐食性、走行特性を向上させ
ることができる。
As explained above, the present invention is configured so that a roll wound up with a magnetic recording medium as a base on which a ferromagnetic metal layer is formed is heat-treated in an atmosphere containing oxygen and moisture.
An oxide film can be satisfactorily formed on the ferromagnetic metal layer in the rolled state. In addition, by appropriately setting the winding tension during winding of the magnetic recording medium, the surface roughness of the magnetic recording medium, etc., the surface of the ferromagnetic metal layer of the magnetic recording medium to be wound can have an excess or deficiency of oxidizing materials such as oxygen and moisture. It is possible to form a good oxide film on the ferromagnetic metal layer. Therefore, the corrosion resistance and running characteristics of the magnetic recording medium can be improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す磁気記録媒体製造装置
の概略図、第2図は磁気記録媒体の縦断綿部分図、第3
図はロール状に巻き取った状態の磁気記録媒体の断面部
分図である。 1・・・ベースフィルム  2・・・原反ロール10・
・・巻き取りロール  12・・・強磁性金属層
FIG. 1 is a schematic diagram of a magnetic recording medium manufacturing apparatus showing one embodiment of the present invention, FIG. 2 is a longitudinal section of a magnetic recording medium, and FIG.
The figure is a partial cross-sectional view of a magnetic recording medium wound into a roll. 1...Base film 2...Material roll 10.
... Winding roll 12 ... Ferromagnetic metal layer

Claims (3)

【特許請求の範囲】[Claims] (1)基体に磁性金属層を形成することにより磁気記録
媒体を構成し、この磁性金属層表面に酸化被膜を形成す
るものにおいて、磁性金属層を形成した磁気記録媒体を
巻取った状態で酸素及び水分の存在する雰囲気下に配置
し、かつこの巻き取った状態の磁気記録媒体に対して加
熱手段を配置したことを特徴とする磁気記録媒体製造装
置。
(1) In a magnetic recording medium in which a magnetic metal layer is formed on a substrate and an oxide film is formed on the surface of the magnetic metal layer, the magnetic recording medium with the magnetic metal layer formed thereon is oxygenated. and a magnetic recording medium manufacturing apparatus, characterized in that the magnetic recording medium is placed in an atmosphere in which moisture is present, and a heating means is placed on the wound magnetic recording medium.
(2)前記基体の平均表面粗さRaを0.002μmか
ら0.05μmの範囲とし、最大表面粗さを0.5μm
以下としたことを特徴とする特許請求の範囲第(1)項
記載の磁気記録媒体製造装置。
(2) The average surface roughness Ra of the substrate is in the range of 0.002 μm to 0.05 μm, and the maximum surface roughness is 0.5 μm.
A magnetic recording medium manufacturing apparatus according to claim (1), characterized in that:
(3)前記基体の巻き取り張力を1kg/mm^2から
5kg/mm^2の範囲としたことを特徴とする特許請
求の範囲第(1)項または第(2)項記載の磁気記録媒
体製造装置。
(3) The magnetic recording medium according to claim 1 or 2, characterized in that the winding tension of the base is in the range of 1 kg/mm^2 to 5 kg/mm^2. Manufacturing equipment.
JP15065686A 1986-06-28 1986-06-28 Apparatus for producing magnetic recording medium Pending JPS639021A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15065686A JPS639021A (en) 1986-06-28 1986-06-28 Apparatus for producing magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15065686A JPS639021A (en) 1986-06-28 1986-06-28 Apparatus for producing magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS639021A true JPS639021A (en) 1988-01-14

Family

ID=15501616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15065686A Pending JPS639021A (en) 1986-06-28 1986-06-28 Apparatus for producing magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS639021A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018007107A1 (en) 2017-09-15 2019-03-21 Fanuc Corporation CONTROL DEVICE AND MACHINE EQUIPMENT
US10962952B2 (en) 2015-04-02 2021-03-30 Fanuc Corporation Servo control apparatus that performs learning control by changing reference axis

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10962952B2 (en) 2015-04-02 2021-03-30 Fanuc Corporation Servo control apparatus that performs learning control by changing reference axis
DE102018007107A1 (en) 2017-09-15 2019-03-21 Fanuc Corporation CONTROL DEVICE AND MACHINE EQUIPMENT

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