JPS59175031A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPS59175031A
JPS59175031A JP58049845A JP4984583A JPS59175031A JP S59175031 A JPS59175031 A JP S59175031A JP 58049845 A JP58049845 A JP 58049845A JP 4984583 A JP4984583 A JP 4984583A JP S59175031 A JPS59175031 A JP S59175031A
Authority
JP
Japan
Prior art keywords
substrate
magnetic recording
org
atmosphere
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58049845A
Other languages
Japanese (ja)
Other versions
JPH0512767B2 (en
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58049845A priority Critical patent/JPS59175031A/en
Publication of JPS59175031A publication Critical patent/JPS59175031A/en
Publication of JPH0512767B2 publication Critical patent/JPH0512767B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85Coating a support with a magnetic layer by vapour deposition
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/72Protective coatings, e.g. anti-static or antifriction

Abstract

PURPOSE:To obtain a magnetic recording medium having improved running property, still characteristic, corrosion resistance and durability in particular by depositing continuously by evaporation a thin ferromagnetic film on a substrate then taking up the substrate in a vapor atmosphere of an org. material having lubricating capacity and forming org. material layers on both surfaces of the substrate. CONSTITUTION:A ferromagnetic metal 6 of Co, etc. is deposited by evaporation on a substrate 1 of polyethylene terephthalate, etc. to form a thin ferromagnetic film. A higher fatty acid ester or higher fatty acid and its amide, etc. or a mixture composed thereof used as an evaporating source 15 in a plate 9 having a jacket construction enclosing concentrically a take-up shaft 4 and the substrate 1 is taken up in the vapor atmosphere of such org. material. The org. material layers are thus formed on both surfaces of the substrate 1, by which the lubricating layers and protective layers stuck more securely on the substrate than by the conventional coating method are formed, and the magnetic recording medium having improved lubricity and corrosion resistance of the magnetic film and having excellent durability is obtd.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は短波長記録特性の優れた金属薄膜型磁気記録媒
体の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a thin metal film type magnetic recording medium having excellent short wavelength recording characteristics.

従来例の構成とその問題点 従来、磁気記録媒体としては、高分子基板やアルミニウ
ム基板上にCoをドープしたγ−Fe2O3やCrO□
等の酸化物磁性粉末、又は強磁性合金粉末等の粉末状磁
性材料をポーリウレタン樹脂等の有機バインダー中に分
散させて、塗布、乾燥させた、いわゆる塗布型のものが
広く実用に供されている。
Conventional configurations and their problems Traditionally, magnetic recording media have been made of Co-doped γ-Fe2O3 or CrO□ on a polymer substrate or aluminum substrate.
So-called coating type materials, in which powdered magnetic materials such as oxide magnetic powders such as oxide magnetic powders or ferromagnetic alloy powders are dispersed in organic binders such as polyurethane resins, coated and dried, are widely used in practical use. There is.

しかし近年の記録密度同上の要望は強く、従来の塗布型
では、記録密度向上に限界がみえ、それに代る新しい媒
体として、短波長記録特性の優れた金属薄膜型磁気記録
媒体が注目され、実用化のための努力が各方面で活発に
行われるに至った。
However, in recent years there has been a strong demand for recording density, and the conventional coating type has reached its limit in improving recording density.As a new medium, metal thin film magnetic recording media with excellent short wavelength recording characteristics are attracting attention and are being put into practical use. Efforts toward this goal have been actively carried out in various fields.

現在得られている金属薄膜型磁気記録媒体は、初期的に
は優れた特性が得られているが、その特性を保持するだ
けの耐久性が不充分であり、実用化には、耐久性の改良
された媒体を大量に製造できる技術が重要になってきて
いる。現在まひに開示されている製法で実用に最も近・
いとされている工法は、高分子基板上に蒸着し巻きあげ
たロールを大気中に取り出して、無着層の表面に滑剤や
防錆剤を塗布、乾燥する方法であるといわれているが、
得られる媒体の性能は不充分であり、実用耐久性面での
向上を因ると、短波長でのC/1’Jが低下する欠点が
あった。
Although currently available metal thin film magnetic recording media have excellent initial characteristics, they are insufficiently durable to maintain these characteristics, and are difficult to put into practical use. Technologies that can produce improved media in large quantities are becoming important. The manufacturing method currently disclosed for paralysis is the closest to practical use.
It is said that the method that is said to be a method of depositing on a polymer substrate, rolling it up, taking it out into the atmosphere, applying a lubricant or rust preventive agent to the surface of the non-adhesive layer, and drying it.
The performance of the obtained medium was insufficient, and when considering improvement in terms of practical durability, it had the disadvantage of a decrease in C/1'J at short wavelengths.

発明の目的 本発明は実用耐久性、特に走行、スチル特性耐食耐久性
を著しく向上させた媒体を短波長域でのCA特性を劣化
させずに大量に得ることの出来る製造方法を提供するこ
とを目的とする。
OBJECT OF THE INVENTION The present invention provides a manufacturing method that can produce a large amount of media with significantly improved practical durability, particularly corrosion resistance durability in running and still characteristics, without deteriorating the CA characteristics in the short wavelength range. purpose.

発明の構成 本発明の製造方法は、基板の少なくとも一方の面側に連
続して強磁性薄膜を蒸着し、この基板を有機物質の蒸気
雰囲気中で巻取って前記強磁性薄膜〃)蒸着された基板
の両面に有機物層を形成することを特徴とする。
Structure of the Invention The manufacturing method of the present invention includes continuously depositing a ferromagnetic thin film on at least one side of a substrate, and rolling up the substrate in an organic substance vapor atmosphere. It is characterized by forming organic layers on both sides of the substrate.

本発明に用いられる基板は、ポリエチレンテレフタレー
ト、ポリ1ミド、ポリイミド、ポリ塩化ビニル、ポリエ
チレンナフタレート、ポリカーボネート、セルローズト
リアセテート等の高分子基板、または必要に応じて、上
記高分子基板上に蒸着、メッキ等の方法、気相成長法等
により、非磁性金属膜、酸化物薄膜、軟磁性薄膜を形成
せしめたもの、高分子薄膜を塗布したもの等が用いられ
る0 本発明において蒸着とは、電子ビーム蒸着、誘導加熱蒸
着、スパッタリング、イオンブレーティング、4界蒸着
等の薄膜形成手段をさしている。
The substrate used in the present invention is a polymer substrate such as polyethylene terephthalate, poly1mide, polyimide, polyvinyl chloride, polyethylene naphthalate, polycarbonate, cellulose triacetate, etc., or if necessary, vapor deposition or plating on the above polymer substrate. In the present invention, evaporation refers to evaporation using an electron beam. It refers to thin film forming means such as vapor deposition, induction heating vapor deposition, sputtering, ion blating, and four-field vapor deposition.

蒸着及び後述の雰囲気巻取りを実施するための装置は、
コンデンサ、装飾分野で既に用いられている半連続巻取
蒸着機を基礎に、本発明の実施に好都合なる如く改造し
tこものが用いられる。
The equipment for performing vapor deposition and atmosphere winding described below is as follows:
A semi-continuous winding vapor deposition machine, which is already used in the capacitor and decoration fields, is used as a basis, modified as appropriate for carrying out the present invention.

本発明に用いられる強磁性n膜としては、C()。The ferromagnetic n film used in the present invention is C().

Fe、Ni、或いはこれらをベースにした各種の合金、
例えばCo−Ni、 Co−Fe、 Co−(:r、 
Co−(u、 Co−Pt* Co−Gd。
Fe, Ni, or various alloys based on these,
For example, Co-Ni, Co-Fe, Co-(:r,
Co-(u, Co-Pt* Co-Gd.

Co−5n、Co→↑−Cr、及びこれらの部分酸化さ
れた薄膜等か挙げられるか、酸化方向による分類の面内
磁化膜、垂直磁化膜のいずれも含まれるものである。
Examples include Co-5n, Co→↑-Cr, and partially oxidized thin films thereof, and include both in-plane magnetized films and perpendicular magnetized films classified by oxidation direction.

巻取り部分を、有機物の飽和蒸気圧に保持する方法とし
て、巻取り軸を包含するように、周辺にホットプレート
を配置し、一定の温度に保持すると共に蒸気源も一定の
温度にする方法が挙げられる。蒸気源は、単一であって
も良いし、複数個であっても良い。巻取り雰囲気は、単
一の有機物質であっても良いし、混合されたものでも良
い。用いられる有機物質は、脂肪酸、脂肪酸アミド、パ
ラフィン系炭化水素、脂肪酸エステル、脂肪酸アルコー
ル等の中より選ばれるものである。
One way to maintain the winding portion at the saturated vapor pressure of organic matter is to place a hot plate around the winding shaft so as to maintain it at a constant temperature, and also to keep the steam source at a constant temperature. Can be mentioned. There may be a single vapor source or a plurality of vapor sources. The winding atmosphere may be a single organic substance or a mixture of organic substances. The organic substance used is selected from fatty acids, fatty acid amides, paraffinic hydrocarbons, fatty acid esters, fatty acid alcohols, and the like.

実施例の説明 以下、本発明の製造方法を具体的な一実施例に基づいて
説明する。なお、以下の実施例におい一〇は必要に応じ
たブロー処理等の前処理をはじめ、通常の巻取り蒸着に
用いられる要素についCも、本゛発明の詳細な説明に直
接関係しないものは省略する。
DESCRIPTION OF EMBODIMENTS The manufacturing method of the present invention will be described below based on a specific embodiment. In addition, in the following examples, 10 indicates pre-treatment such as blowing treatment as necessary, and C indicates elements used in normal rolling vapor deposition.Those not directly related to the detailed description of the present invention are omitted. do.

図面は本発明の製造方法を実施する磁気記録媒体の製造
装置の一実施例の構成図を示す。
The drawing shows a configuration diagram of an embodiment of a magnetic recording medium manufacturing apparatus that implements the manufacturing method of the present invention.

基板(υは、円筒状のクーリングキャン(2)の周側面
に沿って移動し、送り出し軸(3ンより巻取り軸(4)
へ巻き直されるよう構成されている。基板(1)の一方
の面はクーリングキャン(2ンの周側面に沿った状態で
、蒸発源容器(5)内にチャージされた強磁性材料(6
)を加熱して得た蒸気流(7)の一部に露呈されており
、Cf:J露呈きれた部分4こ強磁性薄膜か形成される
。(8)は斜方蒸着で入射角を制限するマメクである。
The substrate (υ) moves along the circumferential side of the cylindrical cooling can (2), and moves from the feeding shaft (3) to the winding shaft (4).
It is configured to be rewound. One side of the substrate (1) is placed along the circumferential side of the cooling can (2), and the ferromagnetic material (6) charged in the evaporation source container (5) is placed along the circumferential side of the cooling can (2).
) is exposed to a part of the vapor flow (7) obtained by heating the Cf:J, and a ferromagnetic thin film is formed in the four exposed parts. (8) is a bean that limits the angle of incidence by oblique evaporation.

なお、強磁性4腺としての垂直磁下膜をスパッタリング
で得る場合、或いは電子ビーム蒸着で得る場合には、別
の工夫力5必要となる。
In addition, when obtaining a perpendicular magnetic sublayer as a four-layer ferromagnetic film by sputtering or by electron beam evaporation, another ingenuity 5 is required.

強磁性薄膜が形成された高分子基板(すは、次のように
して巻取り時に有機物質の雰囲気で巻かれるように構成
されている。すなわち一部門孔さオ′した円筒状のジャ
ケット構造のプレート(9)をほぼ巻取り軸(4)と同
心状に包囲配設し、プレート(9)の内部に温度調節さ
れた熱媒体を流し、プレート(9)の表面温度を一定温
度に保持すると共に、プレート(9)内に配置しlこ有
機蒸気源(ト)の温度調節により、巻取り雰囲Jt(1
)を有機物の一定分圧に保持するよう構成することで具
体化されている。
The polymer substrate on which the ferromagnetic thin film is formed is wound in an organic substance atmosphere during winding as follows. A plate (9) is arranged to surround the winding shaft (4) substantially concentrically, and a temperature-controlled heating medium is flowed inside the plate (9) to maintain the surface temperature of the plate (9) at a constant temperature. At the same time, the winding atmosphere Jt (1
) is configured to maintain a constant partial pressure of organic matter.

こnらの系は、真空槽OcIの内部で配設され、真空槽
αQは隔壁(至)で2室(1) (1)に別けられ、夫
々真空排気系θρ(至)によって排気されている。0<
は回転ローラである。
These systems are arranged inside a vacuum chamber OcI, and the vacuum chamber αQ is divided into two chambers (1) (1) by a partition (to), each of which is evacuated by a vacuum exhaust system θρ (to). There is. 0<
is a rotating roller.

次に実験例に基づいて更に詳しく説明する。Next, a more detailed explanation will be given based on an experimental example.

実施例 ポリエチレンテレフタレートフィルム(厚み10.5μ
m、幅50an)上にCo 80%N、i 20%の合
金を電子ビームに蒸着しI゛こ。クーリングキャン(2
)の直径は100 anで、クーリングキャン(2)の
表面温度は5℃とし、真空度は8X10−Il′Tor
rで最大分圧は般素でその分圧値は2.5 X 10 
’ Torrである。入射角は48°以上とし、平均蒸
着速度は2200 /J’遂ec!である。0.181
t−のCo−Ni O膜を形成終了後、1.8SeC後
に、ステアリング酸ブチル0.18Torrの巻取り雰
囲気(1)で基板(1)を巻取った。巻取りコアの直径
は16.5anで巻取り張力は8.8 kgとした。全
蒸着長2000fllX+)完成した時点から、ステア
リン酸ブチルのソース温度と、ジャケットプレートの温
媒温度を下げて1時間後、大気中に取り出して8〕m+
幅に裁断して磁気テープを得た。
Example polyethylene terephthalate film (thickness 10.5μ
An alloy of 80% Co, N and 20% i was deposited using an electron beam on the surface (width 50 ann) using an electron beam. Cooling Can (2)
) has a diameter of 100 an, the surface temperature of the cooling can (2) is 5℃, and the degree of vacuum is 8X10-Il'Tor.
The maximum partial pressure at r is general element and its partial pressure value is 2.5 x 10
' Torr. The angle of incidence was 48° or more, and the average deposition rate was 2200/J'ac! It is. 0.181
After completing the formation of the t- Co--Ni O film and after 1.8 SeC, the substrate (1) was wound up in a winding atmosphere (1) of 0.18 Torr of butyl steering acid. The diameter of the winding core was 16.5 an, and the winding tension was 8.8 kg. After the completion of the total deposition length of 2000 fllX+), the source temperature of butyl stearate and the temperature of the heating medium of the jacket plate were lowered, and after one hour, it was taken out into the atmosphere and 8〕m+
A magnetic tape was obtained by cutting it into widths.

実施例 ポリエチレンテレフタレ−トフィルム(厚みg pm幅
50cm)上にC080%Ni 2G%の合金を電子ビ
ーム蒸着した。〔実験−1〕と同じ条件で0、18 p
mのCo−Ni−0膜形成終了後1.81iec後にリ
グノセリン酸メチル(18Torrの巻取り雰囲気(f
)で、基板(1)を巻取った。その後のテープ化までの
条件は〔実験例−1〕と同様にした。
EXAMPLE An alloy of 80% C0 and 2G% Ni was deposited by electron beam on a polyethylene terephthalate film (thickness g pm width 50 cm). 0, 18 p under the same conditions as [Experiment-1]
Methyl lignocerate (18 Torr winding atmosphere (f
), the substrate (1) was wound up. The subsequent conditions until tape formation were the same as in [Experimental Example-1].

実施例 ポリエチレンテレフタレート(厚み8.6μm9幅50
an)上にCo 80%Ni 20%の合金を電子ビー
ム蒸着しlこ。〔実験例−1〕と同じ条件で018μm
のCo−N i ()膜形成終了後、1.84;ec後
に、カプリン酸ブチル0.88 Torr 、ベヘン酸
オクチル0.12Torrの2種類の混合の巻取り雰囲
気(1)で、基板(1)を巻取つ7こ。その後のテープ
化までの他の条件は〔実験例−1〕と同様にした。
Example polyethylene terephthalate (thickness 8.6 μm 9 width 50
an) Electron beam evaporation of an alloy of 80% Co and 20% Ni. 018 μm under the same conditions as [Experimental Example-1]
After the completion of the Co-N i () film formation, after 1.84 EC, the substrate (1 ). The other conditions until tape formation thereafter were the same as in [Experimental Example-1].

実施例 ポリエチレンテレフタレートフィルムCMみ8.5pf
n、幅50an)上にCo 80%Ni 20%の合金
を電子ビーム蒸着した。〔実験例−1〕と同じ条件で0
.18μmのco−Ni−0膜形成終了後、1.8秒後
にミリスチン酸0.9Torrの巻取り雰囲気(1)で
基板(1)を巻取った。テープ化までの条件は、〔実験
例−1〕と同様にした。
Example polyethylene terephthalate film CM size 8.5pf
An alloy of 80% Co and 20% Ni was deposited by electron beam evaporation on the substrate (width 50 ann). 0 under the same conditions as [Experiment Example-1]
.. 1.8 seconds after completion of the formation of the 18 μm co-Ni-0 film, the substrate (1) was wound up in a winding atmosphere (1) of 0.9 Torr of myristic acid. The conditions up to tape formation were the same as in [Experimental Example-1].

実施例 ポリエチレンナフタレートフィルム(厚み5μm幅50
01)上にCo 78%Cr 22%の合金を高周波マ
グネブトロンスパッタ法により、062μm蒸着した。
Example polyethylene naphthalate film (thickness 5 μm width 50
01) An alloy of 78% Co and 22% Cr was deposited to a thickness of 062 μm by high frequency magnetobutron sputtering.

クーリングキャン(直径1m、表面温度86℃)とスパ
ッタカソードの距離は9.6 anで、アルゴンが  
 1最大分圧で、4.5 X 10 ” Torrとし
た。Cock垂直磁化膜の形成終了後12.6’sec
後にステアリン酸0.07Torrの巻取り雰囲気(1
)で、基板(1)を巻取った。巻取りコア径は16.5
cflで巻取り張力は2.4kgとした。全長1000
mの蒸着が終った時点から冷却し、1時間後、大気中に
取り出して8+am幅に裁断して磁気テープを得た。
The distance between the cooling can (1 m diameter, surface temperature 86 °C) and the sputter cathode was 9.6 an, and argon was
The maximum partial pressure was 4.5 x 10" Torr. 12.6'sec after the completion of the formation of the Cock perpendicular magnetization film.
Afterwards, a winding atmosphere of 0.07 Torr of stearic acid (1
), the substrate (1) was wound up. Winding core diameter is 16.5
cfl and the winding tension was 2.4 kg. Total length 1000
After the vapor deposition of m was completed, it was cooled, and after 1 hour, it was taken out into the atmosphere and cut into a width of 8+ am to obtain a magnetic tape.

〔比較例−1〕 〔実験例−1〕と同様のCo−Ni−0膜形成後、1時
間後に大気中に取り出し、ステアリン酸ブチル1重量部
に対し、n−ヘキサン150部の塗布液をリバースロー
ルによりコーティングして、5IEI1幅のテープを得
た。
[Comparative Example-1] After forming a Co-Ni-0 film similar to [Experimental Example-1], it was taken out into the atmosphere after 1 hour, and a coating solution containing 150 parts of n-hexane per 1 part by weight of butyl stearate was added. Coating was performed by reverse roll to obtain a 5IEI1 width tape.

〔比較例−2〕 〔実験例−2〕と他は同じ条件で、リグノセリン酸メチ
ル雰囲気で巻取らなかった。基板に、D塗布液を塗布し
てテープを得た。
[Comparative Example-2] The other conditions were the same as [Experimental Example-2], except that winding was not carried out in a methyl lignocerate atmosphere. Coating liquid D was applied to the substrate to obtain a tape.

〔比較例−8〕 〔実験例−8〕で有機雰囲気巻取りをしな0以外は同一
条件の基板を大気中に取り出してO塗布液を塗布してテ
ープを得た。
[Comparative Example-8] A substrate under the same conditions as in [Experimental Example-8] except that it was not wound in an organic atmosphere was taken out into the atmosphere, and an O coating liquid was applied thereto to obtain a tape.

〔比較例−4J の塗布液を塗布してテープを得た。[Comparative example-4J A tape was obtained by coating the coating liquid.

〔比較例−6〕 〔実験例−6〕で有機雰囲気巻取りをしなL)以外は同
一条件の基板を大気中に取り出し、ステアリン酸の塗布
液を塗布して テープを得lこ。
[Comparative Example 6] A substrate under the same conditions as in [Experimental Example 6] except that it was wound in an organic atmosphere was taken out into the atmosphere, and a stearic acid coating solution was applied to obtain a tape.

以上の実験例及び比較例で得られたテープにつき、耐久
性について総合的に評価する方法として、以下の条件で
テストし、1呼られた結果を表に示しfこ。条件は、市
販のVHSデツキ〔松下電器製、マツクロード88(N
v−8800)J と同等の走行系を有する8I幅用の
デツキを試験用に試作し、テープ長50mにつき、繰り
返し走行し、スチル特性を測定することで評価した。評
価した環境は、・80℃190〜1%R)lで、ある1
゜但し、耐食性の評価環境j、i55゜”C,’lO+
・%、RHで、、; 1・i月放置した時の初期のテー
プのフラックス量が何%減少したかを、10点をこつ0
てV、6.M、 (振動試料型磁力計〕で測定した平均
値によって比較検討した。また、スチル(よ、通常環境
での初期の出力を0d13とし、lO分間スチル再生し
1こ時の出力で比較検討しjこ。
As a method for comprehensively evaluating the durability of the tapes obtained in the above experimental examples and comparative examples, tests were conducted under the following conditions, and the results are shown in the table below. The conditions were a commercially available VHS deck [Matsushita Electric, Matsuku Road 88 (N
An 8I width deck with a running system equivalent to that of V-8800) J was manufactured for testing, and evaluated by repeatedly running the tape over a tape length of 50 m and measuring the still characteristics. The environment evaluated was ・80℃190~1%R)l, and a certain 1
゜However, corrosion resistance evaluation environment j, i55゜”C,'lO+
・%, RH,...; 1・How much percent did the initial flux amount of the tape decrease when it was left for i months?
teV, 6. A comparison was made using the average value measured with a vibrating sample magnetometer.Also, the initial output in a normal environment was set to 0d13, the still was played for 10 minutes, and the output at this time was compared. jko.

く表2 この結果により、本発明の製造方法により得た媒体の性
能の優位性は明らかである。
Table 2 From these results, the superiority of the performance of the medium obtained by the manufacturing method of the present invention is clear.

これは次のような理由による。This is due to the following reasons.

強磁性薄膜形成後、大気にさらされる前に、表面の活性
な状態で、防錆剤、滑剤等の役目とする有機物質の雰囲
気に置かれることで、強固に前記強磁性薄膜に有機物質
が付着して耐久性か現出されると共に、雰囲気8巻き取
られるため、強磁性層を有する面と反対側の基板面にも
有機物質が付着するため、後々、巻回して用いる磁気テ
ープでは、転写による表面への滑剤、防錆剤等の微m倶
給源となって、更に持続性が改良されることになる。
After forming a ferromagnetic thin film and before exposing it to the atmosphere, the surface is placed in an active state in an atmosphere of organic substances that serve as rust preventives, lubricants, etc., so that the organic substances are firmly attached to the ferromagnetic thin film. At the same time, the organic substance adheres to the surface of the substrate opposite to the surface with the ferromagnetic layer because it is rolled up in an atmosphere 8 times. The transfer serves as a source of minute amounts of lubricants, rust preventives, etc. to the surface, further improving durability.

単に湿式法等で塗布するのに比べて、蒸気で細部にまで
アタックすると共に、シンタリング作用も合せ有するた
め、保護効果もより大なるものである。
Compared to simply applying with a wet method, it not only attacks fine details with steam, but also has a sintering effect, so it has a greater protective effect.

上記実施例の製造装置において巻取り雰囲気1)は真空
槽01の部室(1)と共通の排気系に)によって排気さ
れているが、巻取り雰囲気(1)を独立排気することも
可能である。
In the manufacturing apparatus of the above embodiment, the winding atmosphere 1) is exhausted by a common exhaust system with the chamber (1) of the vacuum chamber 01, but it is also possible to independently exhaust the winding atmosphere (1). .

上記実施例において、強磁性薄膜は基板の一方の面側に
のみ蒸着され−Cいたが、これは基板の両面に強性薄膜
が蒸着された基板を有機物質の飽和蒸気雰囲気中で巻取
って基板の両面に有機物層を形成することもできる。
In the above example, the ferromagnetic thin film was deposited only on one side of the substrate, but this was done by rolling up the substrate with the ferromagnetic thin film deposited on both sides of the substrate in a saturated vapor atmosphere of organic material. Organic layers can also be formed on both sides of the substrate.

発明の詳細 な説明のように磁気記録媒体の製造方法によると、基板
を有機物質の蒸気雰囲気中で巻取って前記強磁性薄膜が
蒸着された基板の両面に有機物層を形成するため、次の
ような効果力)得られる。
According to the method for manufacturing a magnetic recording medium as described in the detailed description of the invention, the substrate is rolled up in an organic vapor atmosphere to form an organic layer on both sides of the substrate on which the ferromagnetic thin film is deposited. effect) can be obtained.

9従来の塗布と異なり、少量の滑剤、防錆剤等でその役
割を充分果せ、ヘッド表面に付着堆積してスペーシング
・ロスを大きくする等の不都合が生じることがなく、高
いC+をそのまま保持ひきる。
9 Unlike conventional coating, a small amount of lubricant, rust preventive agent, etc. is sufficient to fulfill its role, and there is no inconvenience such as deposition on the head surface and increased spacing loss, and high C+ is maintained as is. Hold and pull.

・防爆、公害対策の不要な乾式法のみで、短波長記録t
ζζ有用な金属薄膜型磁気記録媒体が大量に生産できる
・Short wavelength records can be achieved using only a dry method that does not require explosion-proofing or pollution countermeasures.
ζζ Useful metal thin film magnetic recording media can be produced in large quantities.

O耐久性、耐食性等の従来懸案とされていた金属薄膜型
磁気記録媒体の課題を量産規模で解決することがひき、
超小型VTR等の高密度磁気記録ζζ必要な磁気記録媒
体を大量に供給すること〃)テきる。
It has become possible to solve the problems of metal thin film magnetic recording media, such as durability and corrosion resistance, on a mass production scale.
It is possible to supply a large amount of magnetic recording media necessary for high-density magnetic recording such as ultra-small VTRs.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明の製造方法の具体的な一実施例の製造装置
の主要部構成図である。 (1)・・・基板、(2)・・・クーリングキャン、(
6)・・・強磁性材料、(9)・・・ジャケットプレー
ト、 (It)・・・真空槽、に)・・・有機蒸気源、
(1)・・・巻取り雰囲気代理人  府本義弘 13
The drawing is a block diagram of the main parts of a manufacturing apparatus according to a specific embodiment of the manufacturing method of the present invention. (1)... Board, (2)... Cooling can, (
6)...Ferromagnetic material, (9)...Jacket plate, (It)...Vacuum chamber, ni)...Organic vapor source,
(1)... Winding atmosphere agent Yoshihiro Fumoto 13

Claims (1)

【特許請求の範囲】[Claims] 1、基板の少なくとも一方の面側に連続して強磁性薄膜
を蒸着し、この基板を有機物質の蒸気雰囲気中で巻取っ
て前記強磁性薄膜が蒸気された基板の両面に有機物層を
形成する磁気記録媒体の製造方法。
1. A ferromagnetic thin film is continuously deposited on at least one side of the substrate, and this substrate is rolled up in an organic material vapor atmosphere to form an organic layer on both sides of the substrate where the ferromagnetic thin film has been vaporized. A method for manufacturing a magnetic recording medium.
JP58049845A 1983-03-24 1983-03-24 Production of magnetic recording medium Granted JPS59175031A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58049845A JPS59175031A (en) 1983-03-24 1983-03-24 Production of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58049845A JPS59175031A (en) 1983-03-24 1983-03-24 Production of magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS59175031A true JPS59175031A (en) 1984-10-03
JPH0512767B2 JPH0512767B2 (en) 1993-02-18

Family

ID=12842400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58049845A Granted JPS59175031A (en) 1983-03-24 1983-03-24 Production of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS59175031A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57164432A (en) * 1981-04-02 1982-10-09 Fuji Photo Film Co Ltd Magnetic recording medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57164432A (en) * 1981-04-02 1982-10-09 Fuji Photo Film Co Ltd Magnetic recording medium

Also Published As

Publication number Publication date
JPH0512767B2 (en) 1993-02-18

Similar Documents

Publication Publication Date Title
JPH05342553A (en) Magnetic recording medium and its production
JPH1049853A (en) Magnetic recording medium and its manufacture
JPS59175031A (en) Production of magnetic recording medium
JPS63282921A (en) Production of magnetic recording medium
US4661421A (en) Method for preparing a magnetic recording medium
JPH0582652B2 (en)
JPH08321029A (en) Magnetic recording medium and its production
JP2794580B2 (en) Manufacturing method of magnetic recording media
JPS62185243A (en) Production of magnetic recording medium
KR890001949B1 (en) The magnetic record carrier and its manufacturing method
JPS6262432A (en) Production of magnetic recording medium
JPH04221426A (en) Magnetic recording medium and its manufacture
JPS6139233A (en) Manufacture of metal thin film magnetic recording medium
JPS61284829A (en) Magnetic recording medium
JPH01303623A (en) Magnetic recording medium
JPS61105729A (en) Production of magnetic recording medium
JPS6124023A (en) Manufacture of magnetic recording medium
JPH0660370A (en) Magnetic recording medium and its production
JPS6262431A (en) Production of magnetic recording medium
JPS6262430A (en) Production of magnetic recording medium
JPH05274665A (en) Production of magnetic recording medium
JPS59185033A (en) Production of magnetic recording medium
JPH05159267A (en) Magnetic recording medium and production of the medium
JPH02297715A (en) Magnetic recording medium
JPH04172619A (en) Manufacture of magnetic tape