JPS6389238U - - Google Patents

Info

Publication number

JPS6389238U

JPS6389238U JP18285286U JP18285286U JPS6389238U JP S6389238 U JPS6389238 U JP S6389238U JP 18285286 U JP18285286 U JP 18285286U JP 18285286 U JP18285286 U JP 18285286U JP S6389238 U JPS6389238 U JP S6389238U

Authority

JP

Japan

Prior art keywords

wafer

pressing member

surface pressing

jig according

front surface

Prior art date

1986-11-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010791 quenching Methods 0.000 claims description 3
• 239000004809 Teflon Substances 0.000 claims 1
• 229920006362 Teflon® Polymers 0.000 claims 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
• 238000005530 etching Methods 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 239000012528 membrane Substances 0.000 claims 1
• 230000002093 peripheral effect Effects 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1

Cited By (1)