JPS6389232U - - Google Patents
Info
- Publication number
- JPS6389232U JPS6389232U JP18426986U JP18426986U JPS6389232U JP S6389232 U JPS6389232 U JP S6389232U JP 18426986 U JP18426986 U JP 18426986U JP 18426986 U JP18426986 U JP 18426986U JP S6389232 U JPS6389232 U JP S6389232U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- holder
- compound semiconductor
- vapor phase
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 230000007935 neutral effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18426986U JPS6389232U (enExample) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18426986U JPS6389232U (enExample) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389232U true JPS6389232U (enExample) | 1988-06-10 |
Family
ID=31131784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18426986U Pending JPS6389232U (enExample) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389232U (enExample) |
-
1986
- 1986-11-28 JP JP18426986U patent/JPS6389232U/ja active Pending