JPS61150863U - - Google Patents
Info
- Publication number
- JPS61150863U JPS61150863U JP3552385U JP3552385U JPS61150863U JP S61150863 U JPS61150863 U JP S61150863U JP 3552385 U JP3552385 U JP 3552385U JP 3552385 U JP3552385 U JP 3552385U JP S61150863 U JPS61150863 U JP S61150863U
- Authority
- JP
- Japan
- Prior art keywords
- substrate support
- storage chamber
- substrate
- melt
- melt storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000007791 liquid phase Substances 0.000 claims description 2
- 239000000155 melt Substances 0.000 claims 4
- 238000007789 sealing Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3552385U JPS61150863U (enExample) | 1985-03-13 | 1985-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3552385U JPS61150863U (enExample) | 1985-03-13 | 1985-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61150863U true JPS61150863U (enExample) | 1986-09-18 |
Family
ID=30539881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3552385U Pending JPS61150863U (enExample) | 1985-03-13 | 1985-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61150863U (enExample) |
-
1985
- 1985-03-13 JP JP3552385U patent/JPS61150863U/ja active Pending