JPS6159674U - - Google Patents
Info
- Publication number
- JPS6159674U JPS6159674U JP14304084U JP14304084U JPS6159674U JP S6159674 U JPS6159674 U JP S6159674U JP 14304084 U JP14304084 U JP 14304084U JP 14304084 U JP14304084 U JP 14304084U JP S6159674 U JPS6159674 U JP S6159674U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- epitaxial growth
- flow direction
- carrier gas
- filling hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000012071 phase Substances 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14304084U JPS6159674U (enExample) | 1984-09-20 | 1984-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14304084U JPS6159674U (enExample) | 1984-09-20 | 1984-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6159674U true JPS6159674U (enExample) | 1986-04-22 |
Family
ID=30701353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14304084U Pending JPS6159674U (enExample) | 1984-09-20 | 1984-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6159674U (enExample) |
-
1984
- 1984-09-20 JP JP14304084U patent/JPS6159674U/ja active Pending