JPS6388836A - Measuring device for electronic device - Google Patents

Abstract

PURPOSE:To realize automatic positional correction simply by an inexpensive small-scale system by detecting conductive states among a plurality of probes, each moving the object at every regular pitches in the X and Y directions in response to the result of the detection and correcting positions. CONSTITUTION:A cross-shaped position sensing pattern 5 having the same width as the width of a probe is formed to the object to be measured, and respective probe is arranged so that probing points 3, 4 for the position sensing probe are positioned onto the pattern 5 for position sensing when a probing point 1 for a probe for measurement is positioned at an optimum position on an actual pattern to be inspected 2. Movement is continued until a sensor input 6 is turned ON while the object is each shifted at pitches of x (width of the probe) toward the outside to a volute in the X and Y directions as shown in the arrows in succession from a current position 7. since the pattern width of the position sensing pattern 5 is represented by x, the object can reach to desired points positively. A conductive state between two probes is detected and the position of the object to be measured can be corrected, thus simply realizing automatic positional correction by a small-scale system.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an electronic device measuring apparatus for measuring the characteristics of an electronic device, and particularly to a method for precisely positioning an electronic device.

[Conventional technology]

FIG. 4 shows a conventional electronic device measuring device that performs automatic position correction as disclosed in, for example, Japanese Patent Application Laid-Open No. 60-150637. In the figure, 11 is an XY stage (inspection stage), 12 is a controller, and 13 is an inspection device. Stage control output, 14 is a camera, 15 is a monitor, and 16 is a pattern recognition device.

A conventional electronic device measuring device is configured as described above, and a position detection pattern provided on the surface of the object to be measured is displayed on the monitor 15 by the pattern recognition camera 14, and a pre-stored standard pattern is displayed on the monitor 15. Calculate the amount of deviation from the pattern position and correct the position. Alternatively, when relatively rough positioning is sufficient, coordinates of each point are often managed by relying solely on mechanical positioning.

[Problem that the invention seeks to solve]

In conventional positioning methods in electronic device measurement equipment,
In order to perform precise positioning, a very expensive and large-scale device is required as a whole, and there is a problem that position correction cannot be easily realized at low cost. Also,
Relatively small-scale systems often rely solely on mechanical positioning to manage the coordinates of each point, which has the problem of deviations due to variations in mechanical precision.

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide an electronic device measuring apparatus that can realize automatic position correction at low cost and easily.

[Means for solving problems]

An electronic device measuring apparatus according to the present invention includes a plurality of measurement probes provided at positions corresponding to a pattern to be inspected on an electronic device, and a conductive position detection probe provided at a predetermined position on the electronic device. A plurality of position detection probes provided at positions corresponding to the pattern, a continuity detection means for detecting conduction between the position detection probes via the position detection pattern, and detection of the continuity detection means. The apparatus is provided with a control device that moves the electronic device by a predetermined pitch in each of the X and Y directions in accordance with the results.

[Effect]

In this invention, an electronic device is provided with a pattern to be inspected and a position detection pattern, a measuring device is provided with a plurality of measurement probes and a plurality of position detection probes in a predetermined positional relationship,
The conduction state between the position detection probes is detected through the position detection pattern, and the electronic device is moved by a predetermined pitch in each of the X and Y directions according to the detection result, so it is inexpensive. Simple automatic position correction can be realized.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a plan view showing the probing points of each probe in an electronic device measuring apparatus according to an embodiment of the present invention, FIG. 2 is a diagram for explaining the movement sequence of the stage for position correction, and FIG. The figure is a block diagram showing a system of an electronic device measuring apparatus controlled by a controller such as a microcomputer.

In the figure, 1 is the probing point of the measuring probe provided on the measuring device, 2 is the inspected pattern provided on the object to be measured, 3.4 is the probing point of the position detecting probe of the measuring device, 5 is a pattern for detecting the position of the object to be measured, 6 is a sensor input, 7.8 is the current position and measurement position of the object to be measured, 9 is a prober device, 10
11 is a probe card, 11 is an inspection stage, 12 is a controller, and 13 is an inspection stage control output.

Next, a positioning method in this embodiment will be explained.

As shown in FIG. 1, a cross-shaped position detection pattern 5 having the same width as the probe is provided on the object to be measured, and the measurement probe is probed at the optimum position on the actual pattern 2 to be inspected. When point 1 is located, position detection pattern 5
Each probe is arranged so that the probing point 3.4 of the position detection probe is located at the top. If the position detection probe is on the position detection pattern 5, the blobbing point 1 of the measurement probe is also set to the optimum position.

Further, the position detection pattern 5 is a conductive pattern.

Then, connect one of the two position detection probes to GND,
The other is the sensor input.

Next, a method for correcting the position toward the measurement position 8 when the object is deviated from the predetermined measurement position as shown in FIG. 2 will be described.

The sensor input 6 is turned on while moving the object from the current position 7 in a spiral manner outward in the X and Y directions as shown by the arrows at a pitch of 8 (width of the probe).
Continue moving until Since the pattern width of the position detection pattern 5 is eight, it is possible to reach the desired point without fail. FIG. 3 is a block diagram showing a system in which the above sequence is realized by a controller such as a microcomputer.

According to this embodiment, since the position of the object to be measured can be corrected by detecting the conduction state between the two probes, automatic position correction can be easily realized with a small-scale system.

In the above example, two probes were used as position detection probes, but this uses four probes, two of which are placed in the same position as in the above example, and the remaining two are placed in the same position as in the above example. It may be provided at another tip of the character, and in this case, even more accurate position correction can be performed. In addition, in the above embodiment, a cross pattern was used as the position detection pattern 5, but a square pattern,
Other shapes such as a rectangle may be used, and an empty pattern of the object may be used. Further, the sequence for moving the stage is not limited to the spiral shape, but may be other sequences.

In addition, although the above embodiment shows a prober device that measures electronic devices using a probe card, the same effects as in the above embodiment can also be applied to devices such as a thermal head, an image sensor, a positioning of electronic components such as a hybrid IC, and a die bonder. play.

Further, in the above embodiment, one of the probes for position detection is connected to GND, but other methods may be used as long as continuity between the two probes can be detected.

〔Effect of the invention〕

As described above, according to the electronic device measuring apparatus according to the present invention, the conduction state between a plurality of probes is detected, and the object is moved by a predetermined pitch in each of the X and Y directions according to the detection result. Since position correction is performed, automatic position correction can be easily realized with an inexpensive and small-scale system.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing the probing points of each probe in an electronic device measuring apparatus according to an embodiment of the present invention, FIG. 2 is a diagram for explaining the movement sequence of the stage for position correction, and FIG. The figure is a block diagram of the probing according to the present invention, 1 is the probing point of the measurement probe, 2 is the pattern to be inspected, 3.4 is the probing point of the position detection probe, 5 is the position detection pattern, 6 is a sensor input, 7 is the current position of the object, 8 is the measurement position of the object, 9 is a prober device, 10 is a probe card, 11
12 is an inspection stage, 12 is a controller, 13 is an inspection stage control output, 14 is a camera, 15 is a monitor, and 16 is a recognition device. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (2)

[Claims] (1) An electronic device measuring device that measures the characteristics of an electronic device, comprising: a plurality of measurement probes provided at positions corresponding to the pattern to be inspected on the electronic device; Detecting conduction between the plurality of position detection probes provided at positions corresponding to the provided conductive position detection pattern and the plurality of position detection probes via the position detection pattern. An electronic device measuring apparatus comprising: a continuity detection means; and a control device that moves the electronic device by a predetermined pitch in each of the X and Y directions in accordance with the detection result of the continuity detection means. (2) The position detection pattern is a cross shape having the same width as the position detection probe, and two probes are placed as the position detection probes at positions corresponding to both ends of the cross shape. 2. The electronic device measuring apparatus according to claim 1, further comprising: a control device for moving the electronic device in a spiral manner outward by the width of the cross.